Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator

Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO ) using a complementary metal-oxide-semiconductor (CMOS)-compatib...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors (Basel, Switzerland) Switzerland), 2019-12, Vol.20 (1)
Hauptverfasser:	Matsuura, Sosuke, Yamasaku, Naoki, Nishijima, Yoshiaki, Okazaki, Shinji, Arakawa, Taro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!