Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator
Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO ) using a complementary metal-oxide-semiconductor (CMOS)-compatib...
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| Veröffentlicht in: | Sensors (Basel, Switzerland) Switzerland), 2019-12, Vol.20 (1) |
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| creator | Matsuura, Sosuke Yamasaku, Naoki Nishijima, Yoshiaki Okazaki, Shinji Arakawa, Taro |
| description | Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO
) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO
layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (H
WO
) formed by WO
during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach-Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed. |
| doi_str_mv | 10.3390/s20010096 |
| format | Article |
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) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO
layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (H
WO
) formed by WO
during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach-Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed.</description><identifier>EISSN: 1424-8220</identifier><identifier>DOI: 10.3390/s20010096</identifier><identifier>PMID: 31877934</identifier><language>eng</language><publisher>Switzerland</publisher><ispartof>Sensors (Basel, Switzerland), 2019-12, Vol.20 (1)</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000-0001-9474-7399 ; 0000-0003-0650-4536 ; 0000-0001-5418-9652</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27901,27902</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/31877934$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Matsuura, Sosuke</creatorcontrib><creatorcontrib>Yamasaku, Naoki</creatorcontrib><creatorcontrib>Nishijima, Yoshiaki</creatorcontrib><creatorcontrib>Okazaki, Shinji</creatorcontrib><creatorcontrib>Arakawa, Taro</creatorcontrib><title>Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator</title><title>Sensors (Basel, Switzerland)</title><addtitle>Sensors (Basel)</addtitle><description>Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO
) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO
layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (H
WO
) formed by WO
during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach-Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed.</description><issn>1424-8220</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNqFjsFqwkAQQJdCUVt76A_I_EDqZCfU5FppyaW0VMGLIGuyxhHdlZlVyN8XSnvu6cHjHZ4xjzk-EVU4VYuYI1bPN2aUF7bISmtxaO5UD4iWiMqBGVJezmYVFSOznu-duCZ5YU3cKMQd1Nztjz0sfFBOfPVQ963EzocfFQVenPoWYoDPlK0-gGC6YHjnRqJw6ODLawwuRRmb2507qn_45b2ZvL0u53V2vmxPvt2chU9O-s3fDv0bfAO250Np</recordid><startdate>20191223</startdate><enddate>20191223</enddate><creator>Matsuura, Sosuke</creator><creator>Yamasaku, Naoki</creator><creator>Nishijima, Yoshiaki</creator><creator>Okazaki, Shinji</creator><creator>Arakawa, Taro</creator><scope>NPM</scope><orcidid>https://orcid.org/0000-0001-9474-7399</orcidid><orcidid>https://orcid.org/0000-0003-0650-4536</orcidid><orcidid>https://orcid.org/0000-0001-5418-9652</orcidid></search><sort><creationdate>20191223</creationdate><title>Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator</title><author>Matsuura, Sosuke ; Yamasaku, Naoki ; Nishijima, Yoshiaki ; Okazaki, Shinji ; Arakawa, Taro</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-pubmed_primary_318779343</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Matsuura, Sosuke</creatorcontrib><creatorcontrib>Yamasaku, Naoki</creatorcontrib><creatorcontrib>Nishijima, Yoshiaki</creatorcontrib><creatorcontrib>Okazaki, Shinji</creatorcontrib><creatorcontrib>Arakawa, Taro</creatorcontrib><collection>PubMed</collection><jtitle>Sensors (Basel, Switzerland)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Matsuura, Sosuke</au><au>Yamasaku, Naoki</au><au>Nishijima, Yoshiaki</au><au>Okazaki, Shinji</au><au>Arakawa, Taro</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator</atitle><jtitle>Sensors (Basel, Switzerland)</jtitle><addtitle>Sensors (Basel)</addtitle><date>2019-12-23</date><risdate>2019</risdate><volume>20</volume><issue>1</issue><eissn>1424-8220</eissn><abstract>Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO
) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO
layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (H
WO
) formed by WO
during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach-Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed.</abstract><cop>Switzerland</cop><pmid>31877934</pmid><doi>10.3390/s20010096</doi><orcidid>https://orcid.org/0000-0001-9474-7399</orcidid><orcidid>https://orcid.org/0000-0003-0650-4536</orcidid><orcidid>https://orcid.org/0000-0001-5418-9652</orcidid></addata></record> |
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| ispartof | Sensors (Basel, Switzerland), 2019-12, Vol.20 (1) |
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| source | MDPI - Multidisciplinary Digital Publishing Institute; DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; PubMed Central; Free Full-Text Journals in Chemistry |
| title | Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO 3 /Si Microring Resonator |
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