Fabrication of a precise ellipsoidal mirror for soft X-ray nanofocusing

In X-ray focusing, grazing incidence mirrors offer advantages of no chromatic aberration and high focusing efficiency. Although nanofocusing mirrors have been developed for the hard X-ray region, there is no mirror with nanofocusing performance in the soft X-ray region. Designing a system with the a...

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Veröffentlicht in:	Review of scientific instruments 2018-09, Vol.89 (9), p.093104-093104
Hauptverfasser:	Mimura, Hidekazu, Takei, Yoshinori, Kume, Takehiro, Takeo, Yoko, Motoyama, Hiroto, Egawa, Satoru, Matsuzawa, Yusuke, Yamaguchi, Gota, Senba, Yasunori, Kishimoto, Hikaru, Ohashi, Haruhiko
Format:	Artikel
Sprache:	eng
Schlagworte:	Numerical aperture Scientific apparatus & instruments Soft x rays X ray mirrors
Online-Zugang:	Volltext
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