Comparison of the Thermal Degradation of Heavily Nb-Doped and Normal PZT Thin Films

The degradation of niobium-doped lead zirconate titanate (PZT) and two types of PZT thin films were investigated. Undoped PZT, two-step PZT, and heavily Nb-doped PZT (PNZT) around the morphotropic phase boundary were in situ deposited under optimum condition by RF-magnetron sputtering. All 2-μm-thic...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2017-03, Vol.64 (3), p.617-622
Hauptverfasser:	Yang, Jeong-Suong, Kang, YunSung, Kang, Inyoung, Lim, SeungMo, Shin, Seung-Joo, Lee, JungWon, Hur, Kang Heon
Format:	Artikel
Sprache:	eng
Schlagworte:	Columnar structure Degradation Electrode polarization Electrodes Grain structure High temperature interferometer lead zirconate titanate (PZT) Lead zirconate titanates Magnetron sputtering Measurement by laser beam microelectromechanical system (MEMS) Microelectromechanical systems Niobium Oxygen oxygen vacancy Perovskites Photoluminescence photoluminescence (PL) Piezoelectricity Radio frequency RF sputter sensor Sputtering Temperature measurement Thermal degradation Thermal resistance Thick films Thin films Vacancies
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