Biasing of Capacitive Micromachined Ultrasonic Transducers
Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many l...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2017-02, Vol.64 (2), p.402-413 |
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| creator | Caliano, Giosue Matrone, Giulia Savoia, Alessandro Stuart |
| description | Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple ( |
| doi_str_mv | 10.1109/TUFFC.2016.2623221 |
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They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (<;5 μV) HV generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2016.2623221</identifier><identifier>PMID: 27810808</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>Acoustics ; Bias ; Bias voltage ; Biomedical imaging ; capacitive micromachined ultrasonic transducers (CMUTs) ; capacitive transducer ; Converters ; Electric Capacitance ; Generators ; high-voltage (HV) generator ; Integrated circuits ; Microelectromechanical systems ; Micromachining ; Microtechnology ; Models, Theoretical ; Phantoms, Imaging ; Piezoelectric transducers ; Pressure ; Probes ; ripple rejection ; Ripples ; Switching ; synchronous biasing ; Topology ; Transducers ; Ultrasonic imaging ; Ultrasonic transducers ; Ultrasonography - instrumentation</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2017-02, Vol.64 (2), p.402-413</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2017</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c351t-c019605cb9ab853dbd28911c5ebe410bb46c293bd0f13381d0687203987c0f063</citedby><cites>FETCH-LOGICAL-c351t-c019605cb9ab853dbd28911c5ebe410bb46c293bd0f13381d0687203987c0f063</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7725550$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7725550$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/27810808$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Caliano, Giosue</creatorcontrib><creatorcontrib>Matrone, Giulia</creatorcontrib><creatorcontrib>Savoia, Alessandro Stuart</creatorcontrib><title>Biasing of Capacitive Micromachined Ultrasonic Transducers</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (<;5 μV) HV generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.</description><subject>Acoustics</subject><subject>Bias</subject><subject>Bias voltage</subject><subject>Biomedical imaging</subject><subject>capacitive micromachined ultrasonic transducers (CMUTs)</subject><subject>capacitive transducer</subject><subject>Converters</subject><subject>Electric Capacitance</subject><subject>Generators</subject><subject>high-voltage (HV) generator</subject><subject>Integrated circuits</subject><subject>Microelectromechanical systems</subject><subject>Micromachining</subject><subject>Microtechnology</subject><subject>Models, Theoretical</subject><subject>Phantoms, Imaging</subject><subject>Piezoelectric transducers</subject><subject>Pressure</subject><subject>Probes</subject><subject>ripple rejection</subject><subject>Ripples</subject><subject>Switching</subject><subject>synchronous biasing</subject><subject>Topology</subject><subject>Transducers</subject><subject>Ultrasonic imaging</subject><subject>Ultrasonic transducers</subject><subject>Ultrasonography - instrumentation</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><sourceid>EIF</sourceid><recordid>eNpdkMtOwzAQRS0EouXxAyChSGzYpMzY8SPsIKKAVMSmXUeO44CrNCl2gsTfk9LSBatZzLlXM4eQC4QJIqS388V0mk0ooJhQQRmleEDGyCmPVcr5IRmDUjxmgDAiJyEsATBJUnpMRlQqBAVqTO4enA6ueY_aKsr0WhvXuS8bvTrj25U2H66xZbSoO69D2zgTzb1uQtkb68MZOap0Hez5bp6SxfRxnj3Hs7enl-x-FhvGsYsNYCqAmyLVheKsLEqqUkTDbWEThKJIhKEpK0qokDGFJQglKbBUSQMVCHZKbra9a99-9jZ0-coFY-taN7btQ46KCcm4FBv0-h-6bHvfDNcN1LCXIuE4UHRLDT-G4G2Vr71baf-dI-Qbs_mv2XxjNt-ZHUJXu-q-WNlyH_lTOQCXW8BZa_drKSnnHNgPTRZ6rQ</recordid><startdate>20170201</startdate><enddate>20170201</enddate><creator>Caliano, Giosue</creator><creator>Matrone, Giulia</creator><creator>Savoia, Alessandro Stuart</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>L7M</scope><scope>7X8</scope></search><sort><creationdate>20170201</creationdate><title>Biasing of Capacitive Micromachined Ultrasonic Transducers</title><author>Caliano, Giosue ; Matrone, Giulia ; Savoia, Alessandro Stuart</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c351t-c019605cb9ab853dbd28911c5ebe410bb46c293bd0f13381d0687203987c0f063</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Acoustics</topic><topic>Bias</topic><topic>Bias voltage</topic><topic>Biomedical imaging</topic><topic>capacitive micromachined ultrasonic transducers (CMUTs)</topic><topic>capacitive transducer</topic><topic>Converters</topic><topic>Electric Capacitance</topic><topic>Generators</topic><topic>high-voltage (HV) generator</topic><topic>Integrated circuits</topic><topic>Microelectromechanical systems</topic><topic>Micromachining</topic><topic>Microtechnology</topic><topic>Models, Theoretical</topic><topic>Phantoms, Imaging</topic><topic>Piezoelectric transducers</topic><topic>Pressure</topic><topic>Probes</topic><topic>ripple rejection</topic><topic>Ripples</topic><topic>Switching</topic><topic>synchronous biasing</topic><topic>Topology</topic><topic>Transducers</topic><topic>Ultrasonic imaging</topic><topic>Ultrasonic transducers</topic><topic>Ultrasonography - instrumentation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Caliano, Giosue</creatorcontrib><creatorcontrib>Matrone, Giulia</creatorcontrib><creatorcontrib>Savoia, Alessandro Stuart</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Caliano, Giosue</au><au>Matrone, Giulia</au><au>Savoia, Alessandro Stuart</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Biasing of Capacitive Micromachined Ultrasonic Transducers</atitle><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle><stitle>T-UFFC</stitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><date>2017-02-01</date><risdate>2017</risdate><volume>64</volume><issue>2</issue><spage>402</spage><epage>413</epage><pages>402-413</pages><issn>0885-3010</issn><eissn>1525-8955</eissn><coden>ITUCER</coden><abstract>Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (<;5 μV) HV generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.</abstract><cop>United States</cop><pub>IEEE</pub><pmid>27810808</pmid><doi>10.1109/TUFFC.2016.2623221</doi><tpages>12</tpages></addata></record> |
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| subjects | Acoustics Bias Bias voltage Biomedical imaging capacitive micromachined ultrasonic transducers (CMUTs) capacitive transducer Converters Electric Capacitance Generators high-voltage (HV) generator Integrated circuits Microelectromechanical systems Micromachining Microtechnology Models, Theoretical Phantoms, Imaging Piezoelectric transducers Pressure Probes ripple rejection Ripples Switching synchronous biasing Topology Transducers Ultrasonic imaging Ultrasonic transducers Ultrasonography - instrumentation |
| title | Biasing of Capacitive Micromachined Ultrasonic Transducers |
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