High speed single- and dual-stage vertical positioners
This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the f...
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| Veröffentlicht in: | Review of scientific instruments 2016-08, Vol.87 (8), p.085104-085104 |
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| creator | Yong, Yuen K. Wadikhaye, Sachin P. Fleming, Andrew J. |
| description | This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 μm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 μm and a first evident resonance frequency of 130 kHz. |
| doi_str_mv | 10.1063/1.4960080 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_pubme</sourceid><recordid>TN_cdi_pubmed_primary_27587157</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1816632953</sourcerecordid><originalsourceid>FETCH-LOGICAL-c383t-ae0aa1733e7080c6fe058d41343a7b346e54e45cc46617604c5fbc0910010d0f3</originalsourceid><addsrcrecordid>eNp90E1Lw0AQBuBFFK3Vg39AAl5USJ3JfiVHKX5BwYuel-1mUiNpEneTgv_elNYKCs5lLg_vDC9jZwgTBMVvcCIyBZDCHhshpFmsVcL32QiAi1hpkR6x4xDeYRiJeMiOEi1TjVKPmHosF29RaInyKJT1oqI4snUe5b2t4tDZBUUr8l3pbBW1TSi7sqnJhxN2UNgq0Ol2j9nr_d3L9DGePT88TW9nseMp72JLYC1qzkkP3zlVEMg0F8gFt3rOhSIpSEjnhFKoFQgni7mDDAEQcij4mF1uclvffPQUOrMsg6OqsjU1fTCYolI8ySQf6MUv-t70vh6-MwkmqEFmQg3qaqOcb0LwVJjWl0vrPw2CWZdp0GzLHOz5NrGfLynfye_2BnC9AcGVnV1XszOrxv8kmTYv_sN_T38BVF6HmQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2121705946</pqid></control><display><type>article</type><title>High speed single- and dual-stage vertical positioners</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Yong, Yuen K. ; Wadikhaye, Sachin P. ; Fleming, Andrew J.</creator><creatorcontrib>Yong, Yuen K. ; Wadikhaye, Sachin P. ; Fleming, Andrew J.</creatorcontrib><description>This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 μm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 μm and a first evident resonance frequency of 130 kHz.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.4960080</identifier><identifier>PMID: 27587157</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>High speed ; Piezoelectricity ; Product design ; Scientific apparatus & instruments ; Vertical orientation</subject><ispartof>Review of scientific instruments, 2016-08, Vol.87 (8), p.085104-085104</ispartof><rights>Author(s)</rights><rights>2016 Author(s). Published by AIP Publishing.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c383t-ae0aa1733e7080c6fe058d41343a7b346e54e45cc46617604c5fbc0910010d0f3</citedby><cites>FETCH-LOGICAL-c383t-ae0aa1733e7080c6fe058d41343a7b346e54e45cc46617604c5fbc0910010d0f3</cites><orcidid>0000-0001-7363-5304 ; 0000-0002-5993-409X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.4960080$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,778,782,792,4500,27911,27912,76141</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/27587157$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Yong, Yuen K.</creatorcontrib><creatorcontrib>Wadikhaye, Sachin P.</creatorcontrib><creatorcontrib>Fleming, Andrew J.</creatorcontrib><title>High speed single- and dual-stage vertical positioners</title><title>Review of scientific instruments</title><addtitle>Rev Sci Instrum</addtitle><description>This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 μm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 μm and a first evident resonance frequency of 130 kHz.</description><subject>High speed</subject><subject>Piezoelectricity</subject><subject>Product design</subject><subject>Scientific apparatus & instruments</subject><subject>Vertical orientation</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNp90E1Lw0AQBuBFFK3Vg39AAl5USJ3JfiVHKX5BwYuel-1mUiNpEneTgv_elNYKCs5lLg_vDC9jZwgTBMVvcCIyBZDCHhshpFmsVcL32QiAi1hpkR6x4xDeYRiJeMiOEi1TjVKPmHosF29RaInyKJT1oqI4snUe5b2t4tDZBUUr8l3pbBW1TSi7sqnJhxN2UNgq0Ol2j9nr_d3L9DGePT88TW9nseMp72JLYC1qzkkP3zlVEMg0F8gFt3rOhSIpSEjnhFKoFQgni7mDDAEQcij4mF1uclvffPQUOrMsg6OqsjU1fTCYolI8ySQf6MUv-t70vh6-MwkmqEFmQg3qaqOcb0LwVJjWl0vrPw2CWZdp0GzLHOz5NrGfLynfye_2BnC9AcGVnV1XszOrxv8kmTYv_sN_T38BVF6HmQ</recordid><startdate>201608</startdate><enddate>201608</enddate><creator>Yong, Yuen K.</creator><creator>Wadikhaye, Sachin P.</creator><creator>Fleming, Andrew J.</creator><general>American Institute of Physics</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0001-7363-5304</orcidid><orcidid>https://orcid.org/0000-0002-5993-409X</orcidid></search><sort><creationdate>201608</creationdate><title>High speed single- and dual-stage vertical positioners</title><author>Yong, Yuen K. ; Wadikhaye, Sachin P. ; Fleming, Andrew J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c383t-ae0aa1733e7080c6fe058d41343a7b346e54e45cc46617604c5fbc0910010d0f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>High speed</topic><topic>Piezoelectricity</topic><topic>Product design</topic><topic>Scientific apparatus & instruments</topic><topic>Vertical orientation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yong, Yuen K.</creatorcontrib><creatorcontrib>Wadikhaye, Sachin P.</creatorcontrib><creatorcontrib>Fleming, Andrew J.</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yong, Yuen K.</au><au>Wadikhaye, Sachin P.</au><au>Fleming, Andrew J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High speed single- and dual-stage vertical positioners</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2016-08</date><risdate>2016</risdate><volume>87</volume><issue>8</issue><spage>085104</spage><epage>085104</epage><pages>085104-085104</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 μm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 μm and a first evident resonance frequency of 130 kHz.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>27587157</pmid><doi>10.1063/1.4960080</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0001-7363-5304</orcidid><orcidid>https://orcid.org/0000-0002-5993-409X</orcidid></addata></record> |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | High speed Piezoelectricity Product design Scientific apparatus & instruments Vertical orientation |
| title | High speed single- and dual-stage vertical positioners |
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