A cMUT probe for ultrasound-guided focused ultrasound targeted therapy
Ultrasound-mediated targeted therapy represents a promising strategy in the arsenal of modern therapy. Capacitive micromachined ultrasonic transducer (cMUT) technology could overcome some difficulties encountered by traditional piezoelectric transducers. In this study, we report on the design, fabri...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2015-06, Vol.62 (6), p.1145-1160 |
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| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
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| creator | Gross, Dominique Coutier, Caroline Legros, Mathieu Bouakaz, Ayache Certon, Dominique |
| description | Ultrasound-mediated targeted therapy represents a promising strategy in the arsenal of modern therapy. Capacitive micromachined ultrasonic transducer (cMUT) technology could overcome some difficulties encountered by traditional piezoelectric transducers. In this study, we report on the design, fabrication, and characterization of an ultrasound-guided focused ultrasound (USgFUS) cMUT probe dedicated to preclinical evaluation of targeted therapy (hyperthermia, thermosensitive liposomes activation, and sonoporation) at low frequency (1 MHz) with simultaneous ultrasonic imaging and guidance (15 to 20 MHz). The probe embeds two types of cMUT arrays to perform the modalities of targeted therapy and imaging respectively. The wafer-bonding process flow employed for the manufacturing of the cMUTs is reported. One of its main features is the possibility of implementing two different gap heights on the same wafer. All the design and characterization steps of the devices are described and discussed, starting from the array design up to the first in vitro measurements: optical (microscopy) and electrical (impedance) measurements, arrays' electroacoustic responses, focused pressure field mapping (maximum peak-to-peak pressure = 2.5 MPa), and the first B-scan image of a wire-target phantom. |
| doi_str_mv | 10.1109/TUFFC.2014.006887 |
| format | Article |
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Capacitive micromachined ultrasonic transducer (cMUT) technology could overcome some difficulties encountered by traditional piezoelectric transducers. In this study, we report on the design, fabrication, and characterization of an ultrasound-guided focused ultrasound (USgFUS) cMUT probe dedicated to preclinical evaluation of targeted therapy (hyperthermia, thermosensitive liposomes activation, and sonoporation) at low frequency (1 MHz) with simultaneous ultrasonic imaging and guidance (15 to 20 MHz). The probe embeds two types of cMUT arrays to perform the modalities of targeted therapy and imaging respectively. The wafer-bonding process flow employed for the manufacturing of the cMUTs is reported. One of its main features is the possibility of implementing two different gap heights on the same wafer. All the design and characterization steps of the devices are described and discussed, starting from the array design up to the first in vitro measurements: optical (microscopy) and electrical (impedance) measurements, arrays' electroacoustic responses, focused pressure field mapping (maximum peak-to-peak pressure = 2.5 MPa), and the first B-scan image of a wire-target phantom.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2014.006887</identifier><identifier>PMID: 26067049</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>Acoustics ; Computer-Aided Design ; Electric power ; Engineering Sciences ; Equipment Design ; Fabrication ; Imaging ; Mechanics ; Medical treatment ; Micro and nanotechnologies ; Microelectronics ; Physics ; Probes ; Transducers ; Ultrasonic imaging ; Ultrasonic technology ; Ultrasonic transducers ; Ultrasonography, Interventional - instrumentation</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2015-06, Vol.62 (6), p.1145-1160</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jun 2015</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c449t-ac5b32f0658465c3025025764bf2c10020a9bb8f70914efacafd640eb5a1d4043</citedby><cites>FETCH-LOGICAL-c449t-ac5b32f0658465c3025025764bf2c10020a9bb8f70914efacafd640eb5a1d4043</cites><orcidid>0000-0001-5709-7120 ; 0000-0001-5963-7119</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7119995$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>230,314,780,784,796,885,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7119995$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/26067049$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-01814875$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Gross, Dominique</creatorcontrib><creatorcontrib>Coutier, Caroline</creatorcontrib><creatorcontrib>Legros, Mathieu</creatorcontrib><creatorcontrib>Bouakaz, Ayache</creatorcontrib><creatorcontrib>Certon, Dominique</creatorcontrib><title>A cMUT probe for ultrasound-guided focused ultrasound targeted therapy</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>Ultrasound-mediated targeted therapy represents a promising strategy in the arsenal of modern therapy. Capacitive micromachined ultrasonic transducer (cMUT) technology could overcome some difficulties encountered by traditional piezoelectric transducers. In this study, we report on the design, fabrication, and characterization of an ultrasound-guided focused ultrasound (USgFUS) cMUT probe dedicated to preclinical evaluation of targeted therapy (hyperthermia, thermosensitive liposomes activation, and sonoporation) at low frequency (1 MHz) with simultaneous ultrasonic imaging and guidance (15 to 20 MHz). The probe embeds two types of cMUT arrays to perform the modalities of targeted therapy and imaging respectively. The wafer-bonding process flow employed for the manufacturing of the cMUTs is reported. One of its main features is the possibility of implementing two different gap heights on the same wafer. 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Capacitive micromachined ultrasonic transducer (cMUT) technology could overcome some difficulties encountered by traditional piezoelectric transducers. In this study, we report on the design, fabrication, and characterization of an ultrasound-guided focused ultrasound (USgFUS) cMUT probe dedicated to preclinical evaluation of targeted therapy (hyperthermia, thermosensitive liposomes activation, and sonoporation) at low frequency (1 MHz) with simultaneous ultrasonic imaging and guidance (15 to 20 MHz). The probe embeds two types of cMUT arrays to perform the modalities of targeted therapy and imaging respectively. The wafer-bonding process flow employed for the manufacturing of the cMUTs is reported. One of its main features is the possibility of implementing two different gap heights on the same wafer. 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| subjects | Acoustics Computer-Aided Design Electric power Engineering Sciences Equipment Design Fabrication Imaging Mechanics Medical treatment Micro and nanotechnologies Microelectronics Physics Probes Transducers Ultrasonic imaging Ultrasonic technology Ultrasonic transducers Ultrasonography, Interventional - instrumentation |
| title | A cMUT probe for ultrasound-guided focused ultrasound targeted therapy |
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