Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift
Sub-15 nm-wide gratings with a high aspect ratio of up to 16:1 were fabricated using roll-to-roll nanoimprinting and plasma trimming to achieve high optical performance (up to 12 000:1 extinction ratio with an average transmittance of 82%) and low colour shift (transmittance variation less than 3%)...
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| Veröffentlicht in: | Nanotechnology 2013-07, Vol.24 (26), p.265301-265301 |
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| container_issue | 26 |
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| container_title | Nanotechnology |
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| creator | Wu, Chien-Li Sung, Cheng-Kuo Yao, Po-Hung Chen, Cheng-Huan |
| description | Sub-15 nm-wide gratings with a high aspect ratio of up to 16:1 were fabricated using roll-to-roll nanoimprinting and plasma trimming to achieve high optical performance (up to 12 000:1 extinction ratio with an average transmittance of 82%) and low colour shift (transmittance variation less than 3%) flexible wire-grid polarizers for display applications. We applied two imprint platforms onto glass and plastic substrates to identify the optical properties and characteristics of each fabrication process. To enhance the tolerance, reproducibility, and optical performance of the process, the grating profile symmetry and varying residual layer thicknesses were precisely simulated and controlled to achieve the design targets. |
| doi_str_mv | 10.1088/0957-4484/24/26/265301 |
| format | Article |
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To enhance the tolerance, reproducibility, and optical performance of the process, the grating profile symmetry and varying residual layer thicknesses were precisely simulated and controlled to achieve the design targets.</description><subject>Colour</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Diffraction gratings</subject><subject>Exact sciences and technology</subject><subject>Gratings (spectra)</subject><subject>Materials science</subject><subject>Methods of nanofabrication</subject><subject>Nanocomposites</subject><subject>Nanolithography</subject><subject>Nanomaterials</subject><subject>Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals</subject><subject>Nanostructure</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures</subject><subject>Physics</subject><subject>Structure of solids and liquids; crystallography</subject><subject>Transmittance</subject><subject>Trimming</subject><issn>0957-4484</issn><issn>1361-6528</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqNkc2KFDEUhYMoTjv6CkM2gptycpPKTy1l8A8GXKjrkKSSngypSptU0epr-MKm6HZcKhw4cPnuvXAOQldAXgNR6poMXHZ9r_pr2iSaOCPwCO2ACegEp-ox2j1AF-hZrfeEACgKT9EFZZJxxekO_fq82g44niec4uyPcVzu8L6YJc77itfaDJecUrfkbnM8mznH6VDivCHYzCM-JFMng5cSp2mbLRkHY0t0ZvE4JP892uTxMRbf7UtsfE6mxJ--1DZs71I-YpdTXguudzEsz9GTYFL1L85-ib6-e_vl5kN3--n9x5s3t53rQS5dEL3jlIJio7QqKKl4byQoPgQ1gLMMgvXOWqKcHTnjI_RcWq6GkXjFWgKX6NXp7qHkb6uvi55idT4lM_u8Vg09G6RgDOh_oEA5ASFUQ8UJdSXXWnzQLazJlB8aiN6601steqtF0yahT921xavzj9VOfnxY-1NWA16eAVOdSaGY2cX6l5NcSAqkcfTExXzQ9y3WuaX4r--_Aez3sk0</recordid><startdate>20130705</startdate><enddate>20130705</enddate><creator>Wu, Chien-Li</creator><creator>Sung, Cheng-Kuo</creator><creator>Yao, Po-Hung</creator><creator>Chen, Cheng-Huan</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20130705</creationdate><title>Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift</title><author>Wu, Chien-Li ; Sung, Cheng-Kuo ; Yao, Po-Hung ; Chen, Cheng-Huan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c417t-f64c522183d7b8f87854a71859f891cb31fbecbb08cbd535d1457b589d0e83373</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Colour</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Diffraction gratings</topic><topic>Exact sciences and technology</topic><topic>Gratings (spectra)</topic><topic>Materials science</topic><topic>Methods of nanofabrication</topic><topic>Nanocomposites</topic><topic>Nanolithography</topic><topic>Nanomaterials</topic><topic>Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals</topic><topic>Nanostructure</topic><topic>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</topic><topic>Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures</topic><topic>Physics</topic><topic>Structure of solids and liquids; crystallography</topic><topic>Transmittance</topic><topic>Trimming</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wu, Chien-Li</creatorcontrib><creatorcontrib>Sung, Cheng-Kuo</creatorcontrib><creatorcontrib>Yao, Po-Hung</creatorcontrib><creatorcontrib>Chen, Cheng-Huan</creatorcontrib><collection>Pascal-Francis</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Nanotechnology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wu, Chien-Li</au><au>Sung, Cheng-Kuo</au><au>Yao, Po-Hung</au><au>Chen, Cheng-Huan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift</atitle><jtitle>Nanotechnology</jtitle><stitle>Nano</stitle><addtitle>Nanotechnology</addtitle><date>2013-07-05</date><risdate>2013</risdate><volume>24</volume><issue>26</issue><spage>265301</spage><epage>265301</epage><pages>265301-265301</pages><issn>0957-4484</issn><eissn>1361-6528</eissn><coden>NNOTER</coden><abstract>Sub-15 nm-wide gratings with a high aspect ratio of up to 16:1 were fabricated using roll-to-roll nanoimprinting and plasma trimming to achieve high optical performance (up to 12 000:1 extinction ratio with an average transmittance of 82%) and low colour shift (transmittance variation less than 3%) flexible wire-grid polarizers for display applications. We applied two imprint platforms onto glass and plastic substrates to identify the optical properties and characteristics of each fabrication process. To enhance the tolerance, reproducibility, and optical performance of the process, the grating profile symmetry and varying residual layer thicknesses were precisely simulated and controlled to achieve the design targets.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><pmid>23735852</pmid><doi>10.1088/0957-4484/24/26/265301</doi><tpages>7</tpages></addata></record> |
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| source | Institute of Physics Journals |
| subjects | Colour Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Diffraction gratings Exact sciences and technology Gratings (spectra) Materials science Methods of nanofabrication Nanocomposites Nanolithography Nanomaterials Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals Nanostructure Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures Physics Structure of solids and liquids crystallography Transmittance Trimming |
| title | Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift |
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