Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor

Primary zirconia nanoparticles were conformally coated with alumina ultrathin films using atomic layer deposition (ALD) in a fluidized bed reactor. Alternating doses of trimethylaluminium and water vapour were performed to deposit Al(2)O(3) nanolayers on the surface of 26 nm zirconia nanoparticles....

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Veröffentlicht in:	Nanotechnology 2005-07, Vol.16 (7), p.S375-S381
Hauptverfasser:	Hakim, Luis F, George, Steven M, Weimer, Alan W
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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