Encapsulated tips for reliable nanoscale conduction in scanning probe technologies

Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting cor...

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Veröffentlicht in:Nanotechnology 2009-03, Vol.20 (10), p.105701-105701
Hauptverfasser: Bhaskaran, Harish, Sebastian, Abu, Drechsler, Ute, Despont, Michel
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creator Bhaskaran, Harish
Sebastian, Abu
Drechsler, Ute
Despont, Michel
description Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting core is presented. A method to fabricate such tips on conducting silicon microcantilevers is described. Long-term conduction and wear reliability of these nanoscale tips are evaluated systematically, and their ability to operate for sliding distances greater than 2 m in conduction and 11 m in wear on amorphous carbon is demonstrated. These results are expected to have an impact on the future of conducting probe-based technologies such as probe-based nanometrology, data storage and nanolithography.
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subjects Electric Conductivity
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems - instrumentation
Microelectrodes
Microscopy, Scanning Probe - instrumentation
Microscopy, Scanning Probe - methods
Nanotechnology - methods
Transducers
title Encapsulated tips for reliable nanoscale conduction in scanning probe technologies
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