Full-field imaging of gigahertz film bulk acoustic resonator motion
A full-field view laser ultrasonic imaging method has been developed that measures acoustic motion at a surface without scanning. Images are recorded at normal video frame rates by using dynamic holography with photorefractive interferometric detection. By extending the approach to ultra high freque...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2003-10, Vol.50 (10), p.1279-1285 |
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| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
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| creator | Telschow, K.L. Deason, V.A. Cottle, D.L. Larson, J.D. |
| description | A full-field view laser ultrasonic imaging method has been developed that measures acoustic motion at a surface without scanning. Images are recorded at normal video frame rates by using dynamic holography with photorefractive interferometric detection. By extending the approach to ultra high frequencies, an acoustic microscope has been developed that is capable of operation at gigahertz frequency and micron length scales. Both acoustic amplitude and phase are recorded, allowing full calibration and determination of phases to within a single arbitrary constant. Results are presented of measurements at frequencies of 800-900 MHz, illustrating a multitude of normal mode behavior in electrically driven thin film acoustic resonators. Coupled with microwave electrical impedance measurements, this imaging mode provides an exceptionally fast method for evaluation of electric-to-acoustic coupling of these devices and their performance. Images of 256 /spl times/ 240 pixels are recorded at 18 fps rates synchronized to obtain both in-phase and quadrature detection of the acoustic motion. Simple averaging provides sensitivity to the subnanometer level at each pixel calibrated over the image using interferometry. Identification of specific acoustic modes and their relationship to electrical impedance characteristics show the advantages and overall high speed of the technique. |
| doi_str_mv | 10.1109/TUFFC.2003.1244744 |
| format | Article |
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Images are recorded at normal video frame rates by using dynamic holography with photorefractive interferometric detection. By extending the approach to ultra high frequencies, an acoustic microscope has been developed that is capable of operation at gigahertz frequency and micron length scales. Both acoustic amplitude and phase are recorded, allowing full calibration and determination of phases to within a single arbitrary constant. Results are presented of measurements at frequencies of 800-900 MHz, illustrating a multitude of normal mode behavior in electrically driven thin film acoustic resonators. Coupled with microwave electrical impedance measurements, this imaging mode provides an exceptionally fast method for evaluation of electric-to-acoustic coupling of these devices and their performance. Images of 256 /spl times/ 240 pixels are recorded at 18 fps rates synchronized to obtain both in-phase and quadrature detection of the acoustic motion. Simple averaging provides sensitivity to the subnanometer level at each pixel calibrated over the image using interferometry. Identification of specific acoustic modes and their relationship to electrical impedance characteristics show the advantages and overall high speed of the technique.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2003.1244744</identifier><identifier>PMID: 14609067</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Acoustic devices ; Acoustic imaging ; Acoustic measurement ; Acoustic measurements ; Acoustic signal detection ; Acoustic wave devices, piezoelectric and piezoresistive devices ; Acoustics ; Applied sciences ; Calibration ; Couplings ; Electrical impedance ; Electronics ; Exact sciences and technology ; Film bulk acoustic resonators ; Frequency ; Imaging ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Interferometers ; Motion measurement ; Optical instruments, equipment and techniques ; Physics ; Pixel ; Pixels ; Resonators ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Ultrasonic imaging</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2003-10, Vol.50 (10), p.1279-1285</ispartof><rights>2003 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2003</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c439t-22b1de91c1db5658bf33eb5cc013aa9f9ceefb87beb0a513c92ffbf6b4f0aed13</citedby><cites>FETCH-LOGICAL-c439t-22b1de91c1db5658bf33eb5cc013aa9f9ceefb87beb0a513c92ffbf6b4f0aed13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1244744$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1244744$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=15227168$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/14609067$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Telschow, K.L.</creatorcontrib><creatorcontrib>Deason, V.A.</creatorcontrib><creatorcontrib>Cottle, D.L.</creatorcontrib><creatorcontrib>Larson, J.D.</creatorcontrib><title>Full-field imaging of gigahertz film bulk acoustic resonator motion</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>A full-field view laser ultrasonic imaging method has been developed that measures acoustic motion at a surface without scanning. Images are recorded at normal video frame rates by using dynamic holography with photorefractive interferometric detection. By extending the approach to ultra high frequencies, an acoustic microscope has been developed that is capable of operation at gigahertz frequency and micron length scales. Both acoustic amplitude and phase are recorded, allowing full calibration and determination of phases to within a single arbitrary constant. Results are presented of measurements at frequencies of 800-900 MHz, illustrating a multitude of normal mode behavior in electrically driven thin film acoustic resonators. Coupled with microwave electrical impedance measurements, this imaging mode provides an exceptionally fast method for evaluation of electric-to-acoustic coupling of these devices and their performance. Images of 256 /spl times/ 240 pixels are recorded at 18 fps rates synchronized to obtain both in-phase and quadrature detection of the acoustic motion. Simple averaging provides sensitivity to the subnanometer level at each pixel calibrated over the image using interferometry. Identification of specific acoustic modes and their relationship to electrical impedance characteristics show the advantages and overall high speed of the technique.</description><subject>Acoustic devices</subject><subject>Acoustic imaging</subject><subject>Acoustic measurement</subject><subject>Acoustic measurements</subject><subject>Acoustic signal detection</subject><subject>Acoustic wave devices, piezoelectric and piezoresistive devices</subject><subject>Acoustics</subject><subject>Applied sciences</subject><subject>Calibration</subject><subject>Couplings</subject><subject>Electrical impedance</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Film bulk acoustic resonators</subject><subject>Frequency</subject><subject>Imaging</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Interferometers</subject><subject>Motion measurement</subject><subject>Optical instruments, equipment and techniques</subject><subject>Physics</subject><subject>Pixel</subject><subject>Pixels</subject><subject>Resonators</subject><subject>Semiconductor electronics. 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Solid state devices</subject><subject>Ultrasonic imaging</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqF0U1v1DAQBmALUdGl5Q-AhCIk4JTt-Cuxj9WKBaRKvbRny3bsxcWJi50c4NfjspFW4gAnH_zMjMcvQq8xbDEGeXV3v9_vtgSAbjFhrGfsGdpgTngrJOfP0QaE4C0FDOfoZSkPAJgxSV6gc8w6kND1G7TbLzG2Prg4NGHUhzAdmuSbQzjoby7Pvxof4tiYJX5vtE1LmYNtsitp0nPKzZjmkKZLdOZ1LO7Vel6g-_2nu92X9ub289fd9U1rGZVzS4jBg5PY4sHwjgvjKXWGWwuYai29tM55I3rjDGiOqZXEe-M7wzxoN2B6gT4e-z7m9GNxZVZjKNbFqCdXn6Yk4E4AI7LKD_-UPaZ1AMP_hUSQDmhHK3z3F3xIS57qukoIRjjlPVREjsjmVEp2Xj3m-qn5p8KgniJTfyJTT5GpNbJa9HbtvJjRDaeSNaMK3q9AF6ujz3qyoZwcJ6Svi1f35uiCc-50vY75Datdp1Q</recordid><startdate>20031001</startdate><enddate>20031001</enddate><creator>Telschow, K.L.</creator><creator>Deason, V.A.</creator><creator>Cottle, D.L.</creator><creator>Larson, J.D.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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Solid state devices</topic><topic>Ultrasonic imaging</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Telschow, K.L.</creatorcontrib><creatorcontrib>Deason, V.A.</creatorcontrib><creatorcontrib>Cottle, D.L.</creatorcontrib><creatorcontrib>Larson, J.D.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Telschow, K.L.</au><au>Deason, V.A.</au><au>Cottle, D.L.</au><au>Larson, J.D.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Full-field imaging of gigahertz film bulk acoustic resonator motion</atitle><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle><stitle>T-UFFC</stitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><date>2003-10-01</date><risdate>2003</risdate><volume>50</volume><issue>10</issue><spage>1279</spage><epage>1285</epage><pages>1279-1285</pages><issn>0885-3010</issn><eissn>1525-8955</eissn><coden>ITUCER</coden><abstract>A full-field view laser ultrasonic imaging method has been developed that measures acoustic motion at a surface without scanning. Images are recorded at normal video frame rates by using dynamic holography with photorefractive interferometric detection. By extending the approach to ultra high frequencies, an acoustic microscope has been developed that is capable of operation at gigahertz frequency and micron length scales. Both acoustic amplitude and phase are recorded, allowing full calibration and determination of phases to within a single arbitrary constant. Results are presented of measurements at frequencies of 800-900 MHz, illustrating a multitude of normal mode behavior in electrically driven thin film acoustic resonators. Coupled with microwave electrical impedance measurements, this imaging mode provides an exceptionally fast method for evaluation of electric-to-acoustic coupling of these devices and their performance. Images of 256 /spl times/ 240 pixels are recorded at 18 fps rates synchronized to obtain both in-phase and quadrature detection of the acoustic motion. 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| ispartof | IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2003-10, Vol.50 (10), p.1279-1285 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustic devices Acoustic imaging Acoustic measurement Acoustic measurements Acoustic signal detection Acoustic wave devices, piezoelectric and piezoresistive devices Acoustics Applied sciences Calibration Couplings Electrical impedance Electronics Exact sciences and technology Film bulk acoustic resonators Frequency Imaging Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Motion measurement Optical instruments, equipment and techniques Physics Pixel Pixels Resonators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Ultrasonic imaging |
| title | Full-field imaging of gigahertz film bulk acoustic resonator motion |
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