Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films

In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion...

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Veröffentlicht in:	Thin solid films 2011-12, Vol.520 (5), p.1660-1667
Hauptverfasser:	Wilke, Marcus, Teichert, Gerd, Gemma, Ryota, Pundt, Astrid, Kirchheim, Reiner, Romanus, Henry, Schaaf, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Defects and impurities: doping, implantation, distribution, concentration, etc Electric discharges Electrodeposition, electroplating Elemental depth profiles Emission analysis Exact sciences and technology GDOES Glow discharge optical emission spectroscopy Glow discharges Glow corona Light elements Materials science Mathematical analysis MAX phase Methods of deposition of films and coatings film growth and epitaxy Multilayers Nanoscale materials and structures: fabrication and characterization Other topics in nanoscale materials and structures Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Spectroscopy Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thick coatings Thin film analysis Thin film structure and morphology Thin films Thin films and coatings
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