Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films
In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion...
Gespeichert in:
| Veröffentlicht in: | Thin solid films 2011-12, Vol.520 (5), p.1660-1667 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1667 |
|---|---|
| container_issue | 5 |
| container_start_page | 1660 |
| container_title | Thin solid films |
| container_volume | 520 |
| creator | Wilke, Marcus Teichert, Gerd Gemma, Ryota Pundt, Astrid Kirchheim, Reiner Romanus, Henry Schaaf, Peter |
| description | In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion rates and erosion depths, sensitivity, analysis of nonconductive layers and easy quantification even for light elements such as C, N, O and H. Starting with the fundamentals of GDOES, a short overview on new developments in instrument design for accurate and well resolved thin film analyses is presented.
The article focuses on the analytical capabilities of glow discharge optical emission spectrometry in the analysis of metallic coatings and thin films. Results illustrating the high depth resolution, confirmation of stoichiometry, the detection of light elements in coatings as well as contamination on the surface or interfaces will be demonstrated by measurements of: a multilayer system Cr/Ti on silicon, interface contamination on silicon during deposition of aluminum, Al
2O
3-nanoparticle containing conversion coatings on zinc for corrosion resistance, Ti
3SiC
2 MAX-phase coatings by pulsed laser deposition and hydrogen detection in a V/Fe multilayer system. The selected examples illustrate that GDOES can be successfully adopted as an analytical tool in the development of new materials and coatings. A discussion of the results as well as of the limitations of GDOES is presented. |
| doi_str_mv | 10.1016/j.tsf.2011.07.058 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_968175376</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0040609011014453</els_id><sourcerecordid>1671308350</sourcerecordid><originalsourceid>FETCH-LOGICAL-c458t-d2359fa698463caa69a331d033912aed31ac3a875b8be5a926a2327ac2a5304b3</originalsourceid><addsrcrecordid>eNp9kU1r3DAQhkVpoNu0P6A3XUp6sTuSVh8mpxLyUQj00pzFrCwnWryWq_Em7L-vkg055qRBPDMjvQ9j3wS0AoT5uW0XGloJQrRgW9DuA1sJZ7tGWiU-shXAGhoDHXxin4m2ACCkVCuWr8f8xPtE4QHLfeR5XlLAkcddIkp54jTHsJRMIc8HPuTCMYR9wSVynHr-FMeRl0h5fIx9vcHxQIl4HnjIuKTpnl6w5SFNfEjjjr6wkwFHil9fz1N2d3X59-Kmuf1z_fvi120T1totTS-V7gY0nVsbFbAWqJToQalOSIy9EhgUOqs3bhM1dtKgVNJikKgVrDfqlJ0d584l_9tHWnz9UKivxSnmPfnOOGG1sqaSP94lhbFCgVMaKiqOaKiBUImDn0vaYTl4Af5Zg9_6qsE_a_BgfdVQe76_jkeqwQ4Fp5DorVFqp41QsnLnRy7WVB5TLJ5CilOIfSrVgO9zemfLf8RLnj0</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1671308350</pqid></control><display><type>article</type><title>Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films</title><source>Access via ScienceDirect (Elsevier)</source><creator>Wilke, Marcus ; Teichert, Gerd ; Gemma, Ryota ; Pundt, Astrid ; Kirchheim, Reiner ; Romanus, Henry ; Schaaf, Peter</creator><creatorcontrib>Wilke, Marcus ; Teichert, Gerd ; Gemma, Ryota ; Pundt, Astrid ; Kirchheim, Reiner ; Romanus, Henry ; Schaaf, Peter</creatorcontrib><description>In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion rates and erosion depths, sensitivity, analysis of nonconductive layers and easy quantification even for light elements such as C, N, O and H. Starting with the fundamentals of GDOES, a short overview on new developments in instrument design for accurate and well resolved thin film analyses is presented.
The article focuses on the analytical capabilities of glow discharge optical emission spectrometry in the analysis of metallic coatings and thin films. Results illustrating the high depth resolution, confirmation of stoichiometry, the detection of light elements in coatings as well as contamination on the surface or interfaces will be demonstrated by measurements of: a multilayer system Cr/Ti on silicon, interface contamination on silicon during deposition of aluminum, Al
2O
3-nanoparticle containing conversion coatings on zinc for corrosion resistance, Ti
3SiC
2 MAX-phase coatings by pulsed laser deposition and hydrogen detection in a V/Fe multilayer system. The selected examples illustrate that GDOES can be successfully adopted as an analytical tool in the development of new materials and coatings. A discussion of the results as well as of the limitations of GDOES is presented.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2011.07.058</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Coatings ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Defects and impurities: doping, implantation, distribution, concentration, etc ; Electric discharges ; Electrodeposition, electroplating ; Elemental depth profiles ; Emission analysis ; Exact sciences and technology ; GDOES ; Glow discharge optical emission spectroscopy ; Glow discharges ; Glow; corona ; Light elements ; Materials science ; Mathematical analysis ; MAX phase ; Methods of deposition of films and coatings; film growth and epitaxy ; Multilayers ; Nanoscale materials and structures: fabrication and characterization ; Other topics in nanoscale materials and structures ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges ; Spectroscopy ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thick coatings ; Thin film analysis ; Thin film structure and morphology ; Thin films ; Thin films and coatings</subject><ispartof>Thin solid films, 2011-12, Vol.520 (5), p.1660-1667</ispartof><rights>2011 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c458t-d2359fa698463caa69a331d033912aed31ac3a875b8be5a926a2327ac2a5304b3</citedby><cites>FETCH-LOGICAL-c458t-d2359fa698463caa69a331d033912aed31ac3a875b8be5a926a2327ac2a5304b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.tsf.2011.07.058$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,3550,23930,23931,25140,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=25856132$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Wilke, Marcus</creatorcontrib><creatorcontrib>Teichert, Gerd</creatorcontrib><creatorcontrib>Gemma, Ryota</creatorcontrib><creatorcontrib>Pundt, Astrid</creatorcontrib><creatorcontrib>Kirchheim, Reiner</creatorcontrib><creatorcontrib>Romanus, Henry</creatorcontrib><creatorcontrib>Schaaf, Peter</creatorcontrib><title>Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films</title><title>Thin solid films</title><description>In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion rates and erosion depths, sensitivity, analysis of nonconductive layers and easy quantification even for light elements such as C, N, O and H. Starting with the fundamentals of GDOES, a short overview on new developments in instrument design for accurate and well resolved thin film analyses is presented.
The article focuses on the analytical capabilities of glow discharge optical emission spectrometry in the analysis of metallic coatings and thin films. Results illustrating the high depth resolution, confirmation of stoichiometry, the detection of light elements in coatings as well as contamination on the surface or interfaces will be demonstrated by measurements of: a multilayer system Cr/Ti on silicon, interface contamination on silicon during deposition of aluminum, Al
2O
3-nanoparticle containing conversion coatings on zinc for corrosion resistance, Ti
3SiC
2 MAX-phase coatings by pulsed laser deposition and hydrogen detection in a V/Fe multilayer system. The selected examples illustrate that GDOES can be successfully adopted as an analytical tool in the development of new materials and coatings. A discussion of the results as well as of the limitations of GDOES is presented.</description><subject>Coatings</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Defects and impurities: doping, implantation, distribution, concentration, etc</subject><subject>Electric discharges</subject><subject>Electrodeposition, electroplating</subject><subject>Elemental depth profiles</subject><subject>Emission analysis</subject><subject>Exact sciences and technology</subject><subject>GDOES</subject><subject>Glow discharge optical emission spectroscopy</subject><subject>Glow discharges</subject><subject>Glow; corona</subject><subject>Light elements</subject><subject>Materials science</subject><subject>Mathematical analysis</subject><subject>MAX phase</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Multilayers</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Other topics in nanoscale materials and structures</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><subject>Spectroscopy</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thick coatings</subject><subject>Thin film analysis</subject><subject>Thin film structure and morphology</subject><subject>Thin films</subject><subject>Thin films and coatings</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kU1r3DAQhkVpoNu0P6A3XUp6sTuSVh8mpxLyUQj00pzFrCwnWryWq_Em7L-vkg055qRBPDMjvQ9j3wS0AoT5uW0XGloJQrRgW9DuA1sJZ7tGWiU-shXAGhoDHXxin4m2ACCkVCuWr8f8xPtE4QHLfeR5XlLAkcddIkp54jTHsJRMIc8HPuTCMYR9wSVynHr-FMeRl0h5fIx9vcHxQIl4HnjIuKTpnl6w5SFNfEjjjr6wkwFHil9fz1N2d3X59-Kmuf1z_fvi120T1totTS-V7gY0nVsbFbAWqJToQalOSIy9EhgUOqs3bhM1dtKgVNJikKgVrDfqlJ0d584l_9tHWnz9UKivxSnmPfnOOGG1sqaSP94lhbFCgVMaKiqOaKiBUImDn0vaYTl4Af5Zg9_6qsE_a_BgfdVQe76_jkeqwQ4Fp5DorVFqp41QsnLnRy7WVB5TLJ5CilOIfSrVgO9zemfLf8RLnj0</recordid><startdate>20111230</startdate><enddate>20111230</enddate><creator>Wilke, Marcus</creator><creator>Teichert, Gerd</creator><creator>Gemma, Ryota</creator><creator>Pundt, Astrid</creator><creator>Kirchheim, Reiner</creator><creator>Romanus, Henry</creator><creator>Schaaf, Peter</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>7SE</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>7TV</scope><scope>C1K</scope></search><sort><creationdate>20111230</creationdate><title>Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films</title><author>Wilke, Marcus ; Teichert, Gerd ; Gemma, Ryota ; Pundt, Astrid ; Kirchheim, Reiner ; Romanus, Henry ; Schaaf, Peter</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c458t-d2359fa698463caa69a331d033912aed31ac3a875b8be5a926a2327ac2a5304b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Coatings</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Defects and impurities: doping, implantation, distribution, concentration, etc</topic><topic>Electric discharges</topic><topic>Electrodeposition, electroplating</topic><topic>Elemental depth profiles</topic><topic>Emission analysis</topic><topic>Exact sciences and technology</topic><topic>GDOES</topic><topic>Glow discharge optical emission spectroscopy</topic><topic>Glow discharges</topic><topic>Glow; corona</topic><topic>Light elements</topic><topic>Materials science</topic><topic>Mathematical analysis</topic><topic>MAX phase</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Multilayers</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Other topics in nanoscale materials and structures</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><topic>Spectroscopy</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thick coatings</topic><topic>Thin film analysis</topic><topic>Thin film structure and morphology</topic><topic>Thin films</topic><topic>Thin films and coatings</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wilke, Marcus</creatorcontrib><creatorcontrib>Teichert, Gerd</creatorcontrib><creatorcontrib>Gemma, Ryota</creatorcontrib><creatorcontrib>Pundt, Astrid</creatorcontrib><creatorcontrib>Kirchheim, Reiner</creatorcontrib><creatorcontrib>Romanus, Henry</creatorcontrib><creatorcontrib>Schaaf, Peter</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>Corrosion Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Pollution Abstracts</collection><collection>Environmental Sciences and Pollution Management</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wilke, Marcus</au><au>Teichert, Gerd</au><au>Gemma, Ryota</au><au>Pundt, Astrid</au><au>Kirchheim, Reiner</au><au>Romanus, Henry</au><au>Schaaf, Peter</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films</atitle><jtitle>Thin solid films</jtitle><date>2011-12-30</date><risdate>2011</risdate><volume>520</volume><issue>5</issue><spage>1660</spage><epage>1667</epage><pages>1660-1667</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>In the last years, glow discharge optical emission spectrometry (GDOES) gained more and more acceptance in the analysis of functional coatings. GDOES thereby represents an interesting alternative to common depth profiling techniques like AES and SIMS, based on its unique combination of high erosion rates and erosion depths, sensitivity, analysis of nonconductive layers and easy quantification even for light elements such as C, N, O and H. Starting with the fundamentals of GDOES, a short overview on new developments in instrument design for accurate and well resolved thin film analyses is presented.
The article focuses on the analytical capabilities of glow discharge optical emission spectrometry in the analysis of metallic coatings and thin films. Results illustrating the high depth resolution, confirmation of stoichiometry, the detection of light elements in coatings as well as contamination on the surface or interfaces will be demonstrated by measurements of: a multilayer system Cr/Ti on silicon, interface contamination on silicon during deposition of aluminum, Al
2O
3-nanoparticle containing conversion coatings on zinc for corrosion resistance, Ti
3SiC
2 MAX-phase coatings by pulsed laser deposition and hydrogen detection in a V/Fe multilayer system. The selected examples illustrate that GDOES can be successfully adopted as an analytical tool in the development of new materials and coatings. A discussion of the results as well as of the limitations of GDOES is presented.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2011.07.058</doi><tpages>8</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0040-6090 |
| ispartof | Thin solid films, 2011-12, Vol.520 (5), p.1660-1667 |
| issn | 0040-6090 1879-2731 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_968175376 |
| source | Access via ScienceDirect (Elsevier) |
| subjects | Coatings Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Defects and impurities: doping, implantation, distribution, concentration, etc Electric discharges Electrodeposition, electroplating Elemental depth profiles Emission analysis Exact sciences and technology GDOES Glow discharge optical emission spectroscopy Glow discharges Glow corona Light elements Materials science Mathematical analysis MAX phase Methods of deposition of films and coatings film growth and epitaxy Multilayers Nanoscale materials and structures: fabrication and characterization Other topics in nanoscale materials and structures Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Spectroscopy Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thick coatings Thin film analysis Thin film structure and morphology Thin films Thin films and coatings |
| title | Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-02T18%3A04%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Glow%20discharge%20optical%20emission%20spectroscopy%20for%20accurate%20and%20well%20resolved%20analysis%20of%20coatings%20and%20thin%20films&rft.jtitle=Thin%20solid%20films&rft.au=Wilke,%20Marcus&rft.date=2011-12-30&rft.volume=520&rft.issue=5&rft.spage=1660&rft.epage=1667&rft.pages=1660-1667&rft.issn=0040-6090&rft.eissn=1879-2731&rft.coden=THSFAP&rft_id=info:doi/10.1016/j.tsf.2011.07.058&rft_dat=%3Cproquest_cross%3E1671308350%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1671308350&rft_id=info:pmid/&rft_els_id=S0040609011014453&rfr_iscdi=true |