Determination of the optical constants of HfO2–SiO2 composite thin films through reverse fitting of transmission spectra

Composite thin films of HfO2:SiO2 with wide range of relative composition from 100:0 (pure HfO2) to 10:90 have been deposited on fused silica substrates by co-evaporation technique and the optical properties of the films have been studied by measuring the transmission spectra of the samples by spect...

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Veröffentlicht in:	Vacuum 2011-11, Vol.86 (4), p.422-428
Hauptverfasser:	Kamble, N.M., Tokas, R.B., Biswas, A., Thakur, S., Bhattacharyya, D., Sahoo, N.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Constants Fittings Hafnium oxide Mathematical models Optical properties Silicon dioxide Spectra Thin films
Online-Zugang:	Volltext
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