Angular distribution of atoms sputtered from alloys

The angular distribution of atoms sputtered from Co 5Sm alloy under 3 keV Ar + and 10 keV Xe + ion bombardment (normal incidence) has been studied experimentally. RBS was used to analyze a material deposited on a collector. The surface composition of Ni x Pd y alloys ( x, y = 1, 3, 5) irradiated by 3 keV Ar + ions was also investigated in situ by Auger electron spectroscopy. Results of these measurements compared with our previous data on component angular distributions sputtered from Ni 5Pd alloy. Sm segregation was found to effect on component angular distributions sputtered from Co 5Sm alloy. It has been found by using AES that Pd segregates to the surface in Ni 5Pd–NiPd 3 alloys, while Ni – in NiPd 5 alloy. A new approach to description of component angular distributions sputtered from Ni x Pd y and Co 5Sm alloys presented.