Piezoelectric properties of microfabricated (K,Na)NbO sub(3 thin films)

A novel microfabrication method of lead-free piezoelectric sodium potassium niobate [(K,Na)NbO sub(3, KNN] thin films was proposed, and the piezoelectric characteristics of the KNN microactuators were evaluated. The KNN thin films were directly deposited on microfabricated Si microcantilevers. The t...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2011-11, Vol.171 (2), p.223-227
Hauptverfasser:	Wakasa, Yu, Kanno, Isaku, Yokokawa, Ryuji, Kotera, Hidetoshi, Shibata, Kenji, Mishima, Tomoyoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Deposition Displacement Mathematical analysis Microactuators Piezoelectricity Sodium Thin films
Online-Zugang:	Volltext
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