Preparation and characterization of GaN photonic crystal arrays by focused ion beam technology

In this study, nano-patterned triangular photonic crystal arrays have been prepared on the surface of blue InGaN/GaN light-emitting diodes by focused ion beam technology. The nitride-based multilayer thin films were grown on c-plane (0001) sapphire substrates by low-pressure metal-organic chemical v...

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Veröffentlicht in:	Surface & coatings technology 2011-11, Vol.206 (5), p.801-805
Hauptverfasser:	Wu, G.M., Yen, C.C., Tsai, B.H., Chien, H.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Cross-disciplinary physics: materials science rheology Electric potential Exact sciences and technology Focused ion beam Gallium nitride Gallium nitrides Ion beams Materials science Nano-patterning Nanomaterials Nanostructure Photonic crystals Physics Surface treatments Voltage
Online-Zugang:	Volltext
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