A Micro Spatial Light Modulator Based on Leverage Principle

This paper presents a novel out-of-plane micro spatial light modulator (μSLM) based on leverage principle. Design principles and analytical models are both developed and verified by Finite-Element-Analysis (FEA). The μSLM consists of four individual actuators, each actuated by electrostatic attracti...

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Veröffentlicht in:	Key engineering materials 2011-01, Vol.483, p.137-142
Hauptverfasser:	Ren, Hao, Chen, Jian Ming, Ni, Zu Gao, Yao, Jun, Gong, Ai Ling
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Displacement Electrostatics Levers Mathematical analysis Optimization Spatial light modulators Strokes
Online-Zugang:	Volltext
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