Characteristics of ZnO thin film deposited on various metal bottom electrodes

ZnO films for electronic applications were deposited by radio-frequency (rf) sputtering onto various metal bottom electrodes (Pt/Ti, W, Ni) to investigate such structural properties as crystallinity and surface morphology. The crystallinity, surface morphology and composition of the as-deposited fil...

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Veröffentlicht in:	Metals and materials international 2003-08, Vol.9 (4), p.383-387
Hauptverfasser:	Jeon, Young Ah, No, Kwang Soo, Kim, Jong Sung, Yoon, Young Soo
Format:	Artikel
Sprache:	eng
Schlagworte:	Compressive properties Crystallinity Deposition Electrodes Grain size Metallurgy Morphology Nickel Platinum Preferred orientation Residual stress Scanning electron microscopy Silicon dioxide Texturing Thin films Titanium Zinc oxide
Online-Zugang:	Volltext
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