Structure Analysis and Simulation of Chemical Sensor for Food Safety Detection

The structure of chemical sensor has great influence on the performance of the sensor. This article studies on the relationship between the structure parameter and the mechanical characteristics of the sensor. The original resonance frequency and modes shape of the structure are obtained by the fini...

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Veröffentlicht in:Key engineering materials 2011-01, Vol.467-469 (SUPPL.1), p.369-372
Hauptverfasser: Meng, Chun Ling, Zhang, Li, Gong, Yan Jue, Wang, Ping, Zhao, Fu
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container_issue SUPPL.1
container_start_page 369
container_title Key engineering materials
container_volume 467-469
creator Meng, Chun Ling
Zhang, Li
Gong, Yan Jue
Wang, Ping
Zhao, Fu
description The structure of chemical sensor has great influence on the performance of the sensor. This article studies on the relationship between the structure parameter and the mechanical characteristics of the sensor. The original resonance frequency and modes shape of the structure are obtained by the finite element analysis. Then a series of simulation comparison analyses are carried out to verify that the performance of modified sensor structure for food safety detection is improved greatly, which provides a good guide for the design of MEMS chemical sensor further.
doi_str_mv 10.4028/www.scientific.net/KEM.467-469.369
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subjects Chemical sensors
Design engineering
Finite element method
Foods
Mathematical analysis
Safety
Sensors
Simulation
title Structure Analysis and Simulation of Chemical Sensor for Food Safety Detection
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