Microstructure and electrical properties of BaTiO3 thin films by modified CSD

0.3 M BaTiO3 (BT) precursor solution was prepared by the modified CSD, in which partially hydrolyzed Ti-alkoxide and Ba precursor solution was reacted in iced water bath to prepare the highly polymerized BT precursor solution. The BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate wi...

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Veröffentlicht in:	Journal of the Ceramic Society of Japan 2011/06/01, Vol.119(1390), pp.498-501
Hauptverfasser:	NAGASAKA, Masaomi, IWASAKI, Dai, SAKAMOTO, Naonori, FU, Desheng, WAKIYA, Naoki, SUZUKI, Hisao
Format:	Artikel
Sprache:	eng
Schlagworte:	Barium titanate Barium titanates Deposition Electrical properties Electrodes Ferroelectric Lanthanum nickel oxide Modified CSD Polymerization Precursors Thin film Thin films Titanium
Online-Zugang:	Volltext
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