Physical and electrical characteristics of metal-organic decomposed CeO2 gate spin-coated on 4H-SiC

The effects of post-deposition annealing temperatures (600–1150°C) in 95%N 2 –5%H 2 ambient on the electrical and physical properties of metal-organic decomposed CeO 2 spin-coated on n-type 4H-SiC were investigated. As the annealing temperature increased, oxides changed from polycrystalline to prefe...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2011-06, Vol.103 (4), p.1067-1075
Hauptverfasser:	Lim, W. F., Cheong, K. Y., Lockman, Z.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Characterization and Evaluation of Materials Condensed Matter Physics Condensed matter: electronic structure, electrical, magnetic, and optical properties Decomposition Density Electrical properties of specific thin films Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Insulators Leakage current Machines Manufacturing Nanotechnology Optical and Electronic Materials Oxides Physical properties Physics Physics and Astronomy Processes Silicates Surface roughness Surfaces and Interfaces Thin Films
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!