Characterization of a photonic strain sensor in silicon-on-insulator technology
Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE 6619, 661914 (2007)] proposed the use of a silicon-waveguide-based ring resonator as...
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| Veröffentlicht in: | Optics letters 2012-02, Vol.37 (4), p.479-481 |
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| container_title | Optics letters |
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| creator | Westerveld, Wouter J Pozo, Jose Harmsma, Peter J Schmits, Ruud Tabak, Erik van den Dool, Teun C Leinders, Suzanne M van Dongen, Koen W A Urbach, H Paul Yousefi, Mirvais |
| description | Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE 6619, 661914 (2007)] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI waveguides and its corresponding modal dispersion where not taken into account. We present a theoretical understanding, as well as experimental results, of strain applied on waveguide-based microresonators, and find that the following effects play important roles: elongation of the racetrack length, modal dispersion of the waveguide, and the strain-induced change in effective refractive index. |
| doi_str_mv | 10.1364/OL.37.000479 |
| format | Article |
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| ispartof | Optics letters, 2012-02, Vol.37 (4), p.479-481 |
| issn | 0146-9592 1539-4794 |
| language | eng |
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| source | Optica Publishing Group Journals |
| subjects | Confinement Dispersions Elongation Photonics Resonators Strain Strain gauges Waveguides |
| title | Characterization of a photonic strain sensor in silicon-on-insulator technology |
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