Plasma ion assisted deposition of aluminium oxide and aluminium oxifluoride layers for applications in the ultraviolet spectral range

Plasma ion assisted deposition of alumina coatings under optimized conditions results in superior UV optical coating properties. A further increase in the UV transparency can be achieved when adding fluorine as reactive gas during deposition. [Display omitted] ► Alumina and aluminium oxifluoride lay...

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Veröffentlicht in:	Optical materials 2011-09, Vol.33 (11), p.1681-1687
Hauptverfasser:	Stenzel, O., Gäbler, D., Wilbrandt, S., Kaiser, N., Steffen, H., Ohl, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminium Aluminium oxide Aluminium oxifluoride Aluminum Aluminum oxide Deposition Evaporation Moisture content Optical coating Optical constants Optical properties Spectra Ultraviolet
Online-Zugang:	Volltext
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