Deposition of diamond-like films of hydrogenized carbon
Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, re...
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| Veröffentlicht in: | Protection of Metals 2009-11, Vol.45 (6), p.645-651 |
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| container_title | Protection of Metals |
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| creator | Bukhovets, V. L. Varshavskaya, I. G. |
| description | Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, relative pulse duration, current density, methane pressure, the value of gas flow), substrate temperature, and geometry of the vacuum chamber affect the deposition rate, properties, and structures of films within a wide range. Diamondlike films of hydrogenized carbon represented nanocomposite material. The size of
sp
2
clusters was 5–6 nm, whereas the
sp
3
/
sp
2
ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure. |
| doi_str_mv | 10.1134/S207020510906001X |
| format | Article |
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sp
2
clusters was 5–6 nm, whereas the
sp
3
/
sp
2
ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure.</description><identifier>ISSN: 2070-2051</identifier><identifier>EISSN: 1608-327X</identifier><identifier>EISSN: 2070-206X</identifier><identifier>DOI: 10.1134/S207020510906001X</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>Carbon ; Characterization and Evaluation of Materials ; Charge ; Chemistry and Materials Science ; Corrosion and Coatings ; Current density ; Deposition ; Diamond-like carbon films ; Electric charge ; Industrial Chemistry/Chemical Engineering ; Inorganic Chemistry ; Materials Science ; Metallic Materials ; Methane ; Physicochemical Processes at the Interfaces ; Pulse duration ; Tribology</subject><ispartof>Protection of Metals, 2009-11, Vol.45 (6), p.645-651</ispartof><rights>Pleiades Publishing, Ltd. 2009</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c299t-7ac854127a389cfa545958a1572a8351720ab94c9dbbce3dfae1d114c09629653</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S207020510906001X$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S207020510906001X$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27923,27924,41487,42556,51318</link.rule.ids></links><search><creatorcontrib>Bukhovets, V. L.</creatorcontrib><creatorcontrib>Varshavskaya, I. G.</creatorcontrib><title>Deposition of diamond-like films of hydrogenized carbon</title><title>Protection of Metals</title><addtitle>Prot Met Phys Chem Surf</addtitle><description>Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, relative pulse duration, current density, methane pressure, the value of gas flow), substrate temperature, and geometry of the vacuum chamber affect the deposition rate, properties, and structures of films within a wide range. Diamondlike films of hydrogenized carbon represented nanocomposite material. The size of
sp
2
clusters was 5–6 nm, whereas the
sp
3
/
sp
2
ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure.</description><subject>Carbon</subject><subject>Characterization and Evaluation of Materials</subject><subject>Charge</subject><subject>Chemistry and Materials Science</subject><subject>Corrosion and Coatings</subject><subject>Current density</subject><subject>Deposition</subject><subject>Diamond-like carbon films</subject><subject>Electric charge</subject><subject>Industrial Chemistry/Chemical Engineering</subject><subject>Inorganic Chemistry</subject><subject>Materials Science</subject><subject>Metallic Materials</subject><subject>Methane</subject><subject>Physicochemical Processes at the Interfaces</subject><subject>Pulse duration</subject><subject>Tribology</subject><issn>2070-2051</issn><issn>1608-327X</issn><issn>2070-206X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNp1kE9LxDAUxIMouK5-AG_Fi6fqe2nSJEfxPyx4UGFvJU3TNWubrMnuYf30tqwgKJ4G3vxmeAwhpwgXiAW7fKYggAJHUFAC4HyPTLAEmRdUzPfJZLTz0T8kRyktBwKA8QkRN3YVklu74LPQZo3TffBN3rl3m7Wu69N4fds2MSysd5-2yYyOdfDH5KDVXbIn3zolr3e3L9cP-ezp_vH6apYbqtQ6F9pIzpAKXUhlWs0ZV1xq5IJqWXAUFHStmFFNXRtbNK222CAyA6qkquTFlJzvelcxfGxsWle9S8Z2nfY2bFKlUCnKQIqBPPtFLsMm-uG5SsqClUoNMiW4g0wMKUXbVqvoeh23FUI1Dln9GXLI0F0mDaxf2PhT_H_oCy8lcyU</recordid><startdate>20091101</startdate><enddate>20091101</enddate><creator>Bukhovets, V. L.</creator><creator>Varshavskaya, I. G.</creator><general>SP MAIK Nauka/Interperiodica</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>7SE</scope></search><sort><creationdate>20091101</creationdate><title>Deposition of diamond-like films of hydrogenized carbon</title><author>Bukhovets, V. L. ; Varshavskaya, I. G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c299t-7ac854127a389cfa545958a1572a8351720ab94c9dbbce3dfae1d114c09629653</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Carbon</topic><topic>Characterization and Evaluation of Materials</topic><topic>Charge</topic><topic>Chemistry and Materials Science</topic><topic>Corrosion and Coatings</topic><topic>Current density</topic><topic>Deposition</topic><topic>Diamond-like carbon films</topic><topic>Electric charge</topic><topic>Industrial Chemistry/Chemical Engineering</topic><topic>Inorganic Chemistry</topic><topic>Materials Science</topic><topic>Metallic Materials</topic><topic>Methane</topic><topic>Physicochemical Processes at the Interfaces</topic><topic>Pulse duration</topic><topic>Tribology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bukhovets, V. L.</creatorcontrib><creatorcontrib>Varshavskaya, I. G.</creatorcontrib><collection>CrossRef</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Corrosion Abstracts</collection><jtitle>Protection of Metals</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bukhovets, V. L.</au><au>Varshavskaya, I. G.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Deposition of diamond-like films of hydrogenized carbon</atitle><jtitle>Protection of Metals</jtitle><stitle>Prot Met Phys Chem Surf</stitle><date>2009-11-01</date><risdate>2009</risdate><volume>45</volume><issue>6</issue><spage>645</spage><epage>651</epage><pages>645-651</pages><issn>2070-2051</issn><eissn>1608-327X</eissn><eissn>2070-206X</eissn><abstract>Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, relative pulse duration, current density, methane pressure, the value of gas flow), substrate temperature, and geometry of the vacuum chamber affect the deposition rate, properties, and structures of films within a wide range. Diamondlike films of hydrogenized carbon represented nanocomposite material. The size of
sp
2
clusters was 5–6 nm, whereas the
sp
3
/
sp
2
ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure.</abstract><cop>Dordrecht</cop><pub>SP MAIK Nauka/Interperiodica</pub><doi>10.1134/S207020510906001X</doi><tpages>7</tpages></addata></record> |
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| ispartof | Protection of Metals, 2009-11, Vol.45 (6), p.645-651 |
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| language | eng |
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| subjects | Carbon Characterization and Evaluation of Materials Charge Chemistry and Materials Science Corrosion and Coatings Current density Deposition Diamond-like carbon films Electric charge Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Metallic Materials Methane Physicochemical Processes at the Interfaces Pulse duration Tribology |
| title | Deposition of diamond-like films of hydrogenized carbon |
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