Characteristics of junctions and resistors fabricated using an all-NbN superconductor integrated circuit foundry process

Trilayer NbN/MgO/NbN tunnel junctions and Mo and NbN/sub x/ resistors fabricated over a NbN ground plane form the basis of a high performance, 10 K, superconductor integrated circuit foundry process. To produce high yield LSI and VLSI superconductor integrated circuits requires predictable device ch...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 1999-06, Vol.9 (2), p.3267-3270
Hauptverfasser:	Kerber, G.L., Abelson, L.A., Elmadjian, R.N., Ladizinsky, E.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Deposition Design. Technologies. Operation analysis. Testing Electrical junctions Electronics Exact sciences and technology Feedback control Foundries Integrated circuit yield Integrated circuits Josephson junctions Large scale integration Magnesium oxide Process control Resistors Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sputtering Superconducting integrated circuits Superconductor junctions Superconductors Very large scale integration
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