Passivation of YBCO dc-SQUIDs using polymerized hexamethyldisilasane

A passivation layer was developed to protect YBCO-devices like flux transformers and SQUIDs against deterioration due to moisture, atmospheric carbon dioxide and oxygen diffusion. The passivation layer is deposited by the polymerization of the silicon organic compound hexamethyldisilasane (HMDS-N) i...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 1999-06, Vol.9 (2), p.3097-3100
Hauptverfasser:	Kramer, A., Mex, L., Francke, C., Muller, J., Kittelberger, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences CARBON DIOXIDE CHEMICAL VAPOR DEPOSITION COPPER OXIDE DIFFUSION Electronics Exact sciences and technology Flux FLUXES Moisture PASSIVATION PINHOLES Plasma measurements Polymerization POLYMERS Protection Relaxation time Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon SQUIDs Superconducting devices SUPERCONDUCTORS Transformers YBCO superconductors Yttrium barium copper oxide YTTRIUM OXIDE
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