Characterization of Diamond: Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition

In this paper, diamond-like carbons were produced on tungsten and aluminum substrates by DC plasma enhanced chemical vapor deposition (DC-PECVD) system in a C 2 H 2 /H 2 gas mixture using C 2 H 2 as source hydrocarbon and H 2 as etching and diluting gas. The operation pressure during the growth and...

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Veröffentlicht in:	Journal of fusion energy 2011-10, Vol.30 (5), p.447-452
Hauptverfasser:	Vaghri, Elnaz, Khalaj, Zahra, Ghoranneviss, Mahmood, Borghei, Majid
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied sciences Atomic force microscopy Carbon Chemical synthesis Chemical vapor deposition Controled nuclear fusion plants Diamond films Diamonds Energy Energy Systems Energy. Thermal use of fuels Exact sciences and technology Fourier transforms Gas mixtures Hydrogen Infrared spectroscopy Installations for energy generation and conversion: thermal and electrical energy Morphology Nuclear Energy Nuclear Fusion Original Research Physics Physics and Astronomy Plasma enhanced chemical vapor deposition Plasma etching Plasma Physics Raman spectroscopy Scanning electron microscopy Spectrum analysis Substrates Sustainable Development Thin films Topography Tungsten Vibration analysis Vibration mode
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