Shape correction of optical surfaces using plasma chemical vaporization machining with a hemispherical tip electrode

We propose a plasma chemical vaporization machining device with a hemispherical tip electrode for optical fabrication. Radio-frequency plasma is generated close to the electrode under atmospheric conditions, and a workpiece is scanned relative to the stationary electrode under three-axis motion cont...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied optics (2004) 2012-01, Vol.51 (3), p.401-407
Hauptverfasser:	Takino, Hideo, Yamamura, Kazuya, Sano, Yasuhisa, Mori, Yuzo
Format:	Artikel
Sprache:	eng
Schlagworte:	Atmospherics Devices Electrodes Machining Motion control Polished Vaporization Workpieces
Online-Zugang:	Volltext
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