Thin layer thickness measurements by zero group velocity Lamb mode resonances
Local and non-contact measurements of the thickness of thin layers deposited on a thick plate have been performed by using zero group velocity (ZGV) Lamb modes. It was shown that the shift of the resonance frequency is proportional to the mass loading through a factor which depends on the mechanical...
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| Veröffentlicht in: | Review of scientific instruments 2011-11, Vol.82 (11), p.114902-114902-6 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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