Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed
The mechanical design of a high-bandwidth, short-range vertical positioning stage is described for integration with a commercial scanning probe microscope (SPM) for dual-stage actuation to significantly improve scanning performance. The vertical motion of the sample platform is driven by a stiff and...
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| Veröffentlicht in: | Review of scientific instruments 2011-12, Vol.82 (12), p.123703-123703-8 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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