Self-consistent optical constants of sputter-deposited B4C thin films

The optical constants of ion-beam-sputtered B₄C films have been measured by ellipsometry in the 190-950 nm range. The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consiste...

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Veröffentlicht in:Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2012, Vol.29 (1), p.117-123
Hauptverfasser: LARRUQUERT, Juan I, PEREZ-MARIN, Antonio P, GARCIA-CORTES, Sergio, DE MARCOS, Luis Rodríguez, AZNAREZ, Jose A, MENDEZ, Jose A
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Sprache:eng
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