Self-consistent optical constants of sputter-deposited B4C thin films
The optical constants of ion-beam-sputtered B₄C films have been measured by ellipsometry in the 190-950 nm range. The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consiste...
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| Veröffentlicht in: | Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2012, Vol.29 (1), p.117-123 |
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| container_title | Journal of the Optical Society of America. A, Optics, image science, and vision |
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| creator | LARRUQUERT, Juan I PEREZ-MARIN, Antonio P GARCIA-CORTES, Sergio DE MARCOS, Luis Rodríguez AZNAREZ, Jose A MENDEZ, Jose A |
| description | The optical constants of ion-beam-sputtered B₄C films have been measured by ellipsometry in the 190-950 nm range. The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consistent set of data by means of Kramers-Krönig analysis. All data correspond to films that were deposited by sputtering on nonheated substrates, and hence they are expected to be amorphous. The B₄C bandgap was calculated as a fitting parameter of Tauc equations for indirect transitions using the present optical constants. Good global accuracy of the data was estimated through the use of various sum rules. The consistent data set includes the visible to the extreme UV (EUV); this large spectrum of characterization will enable the design of multilayer coatings that combine a relatively high reflectance in parts of the EUV with a desired performance at a secondary range, such as the visible. |
| doi_str_mv | 10.1364/JOSAA.29.000117 |
| format | Article |
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The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consistent set of data by means of Kramers-Krönig analysis. All data correspond to films that were deposited by sputtering on nonheated substrates, and hence they are expected to be amorphous. The B₄C bandgap was calculated as a fitting parameter of Tauc equations for indirect transitions using the present optical constants. Good global accuracy of the data was estimated through the use of various sum rules. 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| source | Optica Publishing Group Journals |
| subjects | Exact sciences and technology Fundamental areas of phenomenology (including applications) Optical materials Optics Other nonlinear optical materials photorefractive and semiconductor materials Physics |
| title | Self-consistent optical constants of sputter-deposited B4C thin films |
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