Substrate effect on the electrical properties of sputtered YSZ thin films for co-planar SOFC applications

The physical and electrical properties of sputtered YSZ thin films on various substrates were investigated. The in-plane electrical properties of the films were measured for evaluating YSZ thin film for co-planar SOFC electrolytes. The conductance measured on YSZ over Si substrates was significantly...

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Veröffentlicht in:	Journal of electroceramics 2010-05, Vol.24 (3), p.153-160
Hauptverfasser:	Kim, Sung Moon, Son, Ji-Won, Lee, Kyung-Ryul, Kim, Hyoungchul, Kim, Hae-Ryoung, Lee, Hae-Weon, Lee, Jong-Ho
Format:	Artikel
Sprache:	eng
Schlagworte:	Ceramics Characterization and Evaluation of Materials Chemistry and Materials Science Composites Crystallography and Scattering Methods Electrical properties Electrochemistry Film thickness Glass Materials Science Natural Materials Optical and Electronic Materials Resistivity Sapphire Silicon substrates Solid oxide fuel cells Thin films Yttria stabilized zirconia
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