Design and synthesis of an optimum performance crosslinking resist based on poly (2,4-dimethylstyrene)

We have successfully synthesized and optimized a range of copolymers of 2,4-dimethylstyrene and 3/4-chloromethylstyrene (vinyl benzyl chloride, VBC) as high-performance single-stage-crosslinking electron-beam resists. The formulations were synthesized by a reproducible free-radical-initiated solutio...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 1999-03, Vol.10 (1), p.1-7
Hauptverfasser:	Miller Tate, P, Heshmati, P, Brown, A, Wills, J
Format:	Artikel
Sprache:	eng
Schlagworte:	Chain scission Chloride resistance Copolymers Electronics Optimization Reproduction Resists Solution polymerization
Online-Zugang:	Volltext
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