Electronic transport properties of microcrystalline silicon thin films prepared by VHF-PECVD

Steady-state photocarrier grating (SSPG) and steady-state photoconductivity, sigma sub(ph), experiments have been carried out to investigate the electronic transport properties of undoped hydrogenated microcrystalline silicon ( mu c-Si : H) films prepared with very high frequency plasma enhanced che...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2004-03, Vol.15 (3), p.187-191
Hauptverfasser:	OKUR, S, GÜNES, M, GÖKTAS, O, FINGER, F, CARIUS, R
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic transport in condensed matter Electronics Exact sciences and technology Lamb Minority carriers Photoconduction and photovoltaic effects photodielectric effects Photocurrent Photoelectric effect Physics Silicon Silicon wafers Solar energy Thin films Transport properties
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