Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD

Diamond films were prepared at different grid bias and substrate bias in hot filament chemical vapor deposition (HFCVD) system. The Raman and SEM results show that grain size decreases and non-diamond impurities increase for applying grid and substrate bias currents. The defects and impurities in th...

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Veröffentlicht in:	Transactions of Nonferrous Metals Society of China 2009-12, Vol.19, p.s722-s726
Hauptverfasser:	XU, Feng, ZUO, Dun-wen, LU, Wen-zhuang, ZHU, Yong-wei, WANG, Min
Format:	Artikel
Sprache:	eng
Schlagworte:	Bias Chemical vapor deposition diamond film Diamond films Friction Grain size grid bias HFCVD Impurities Lubrication Mechanical properties substrate bias
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