The influence of fluorine doping on the optical properties of diamond-like carbon thin films

Optical properties of fluorine doped diamond-like carbon (F:DLC) films deposited by the direct current plasma enhanced chemical vapor deposition (PECVD) technique were studied in detail. Surface morphologies of the F:DLC films were studied by an atomic force microscope, which indicated surface rough...

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Veröffentlicht in:	Vacuum 2010-02, Vol.84 (6), p.837-842
Hauptverfasser:	Ahmed, Sk.F., Banerjee, D., Chattopadhyay, K.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Band spectra Diamond-like carbon Diamond-like carbon films Doping Fluorine Fluorine doping Fourier infrared spectroscopy Optical properties Spectra Spectroscopy Thin films Transmittance X-ray photoelectron spectroscopy
Online-Zugang:	Volltext
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