Indium adsorption and incorporation mechanisms in AlN

Density functional theory calculations are implemented in order to scrutinize indium adsorption and incorporation mechanisms in polar AlN. Indium adsorption is promoted on both polarity surfaces and adatom kinetics calculations indicate lower diffusion barriers of indium along the prismatic 〈 〉 dire...

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Veröffentlicht in:	Journal of materials science 2011-06, Vol.46 (12), p.4377-4383
Hauptverfasser:	Kalesaki, Efterpi, Kioseoglou, Joseph, Komninou, Philomela, Karakostas, Theodoros
Format:	Artikel
Sprache:	eng
Schlagworte:	Adatoms Adsorption Aluminum Aluminum compounds Aluminum nitride Characterization and Evaluation of Materials Chemical properties Chemistry and Materials Science Classical Mechanics Crystallography and Scattering Methods Density functional theory Density functionals Diffusion barriers Epitaxial growth Epitaxy Iib 2010 Incorporation Indium Materials Science Mathematical analysis Metalorganic chemical vapor deposition Polarity Polymer Sciences Solid Mechanics Stoichiometry Surface chemistry Surface diffusion Thermodynamics Vapor phase epitaxy
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