Microstructural, mechanical and electrochemical corrosion properties of sputtered titanium-aluminum-nitride films for bio-implants

The effect of aluminum (Al) addition to titanium nitride (TiN) matrix on the structural, mechanical and corrosion resistance properties of titanium-aluminum-nitride was studied. Ti sub(1-x)Al sub(x)N where x = 0, 0.5 and 1 films were coated onto substrates like Si wafer, AISI 316L stainless steel an...

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Veröffentlicht in:	Vacuum 2010-11, Vol.85 (5), p.601-609
Hauptverfasser:	Subramanian, Balasubramanian, Ananthakumar, Ramadoss, Jayachandran, Muthirulandi
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Aluminum base alloys Austenitic stainless steels Blood Corrosion resistance Heat resistant steels Magnetron sputtering Silicon substrates Titanium nitride X-ray photoelectron spectroscopy
Online-Zugang:	Volltext
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