Effect of environmental humidity on rate of thermal outgassing
This investigation presents a super-dry venting system that allows the rate of thermal outgassing of an aluminum chamber (length 2 m) to return rapidly to 1 × 10 −13 mbar L s −1 cm −2 in 4 h without baking. A glove box and an air shower, which provided dehumidified environments with water vapor conc...
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| Veröffentlicht in: | Vacuum 2009-12, Vol.84 (5), p.747-750 |
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| container_end_page | 750 |
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| container_issue | 5 |
| container_start_page | 747 |
| container_title | Vacuum |
| container_volume | 84 |
| creator | Chan, Che-Kai Cheng, Yu-Tsun Hsiung, Gao-Yu Chan, Bei-Jing Ou, Yi-Ching Yang, Chia-Ying Chen, June-Rong |
| description | This investigation presents a super-dry venting system that allows the rate of thermal outgassing of an aluminum chamber (length 2
m) to return rapidly to 1
×
10
−13
mbar
L
s
−1
cm
−2 in 4
h without baking. A glove box and an air shower, which provided dehumidified environments with water vapor concentrations of 0.1
ppm and 5
ppm respectively, were utilized to assess the effect of environmental humidity on the rate of thermal outgassing. With super-dry nitrogen venting inside and exposure to the glove box, a thermal outgassing rate of
q
1
∼
1
×
10
−11
mbar
L
s
−1
cm
−2 was achieved. |
| doi_str_mv | 10.1016/j.vacuum.2009.03.038 |
| format | Article |
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m) to return rapidly to 1
×
10
−13
mbar
L
s
−1
cm
−2 in 4
h without baking. A glove box and an air shower, which provided dehumidified environments with water vapor concentrations of 0.1
ppm and 5
ppm respectively, were utilized to assess the effect of environmental humidity on the rate of thermal outgassing. With super-dry nitrogen venting inside and exposure to the glove box, a thermal outgassing rate of
q
1
∼
1
×
10
−11
mbar
L
s
−1
cm
−2 was achieved.</description><identifier>ISSN: 0042-207X</identifier><identifier>EISSN: 1879-2715</identifier><identifier>DOI: 10.1016/j.vacuum.2009.03.038</identifier><language>eng</language><publisher>Elsevier Ltd</publisher><subject>Air showers ; Aluminum ; Baking ; Chambers ; Dehumidification ; Dry venting ; Gloves ; Humidity ; Outgassing ; Thermal outgas</subject><ispartof>Vacuum, 2009-12, Vol.84 (5), p.747-750</ispartof><rights>2009 Elsevier Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c353t-a35e28035cef7465c1d43e17f6764ecb3c7e152aae95d2c9be5e69c17715f9d23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.vacuum.2009.03.038$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids></links><search><creatorcontrib>Chan, Che-Kai</creatorcontrib><creatorcontrib>Cheng, Yu-Tsun</creatorcontrib><creatorcontrib>Hsiung, Gao-Yu</creatorcontrib><creatorcontrib>Chan, Bei-Jing</creatorcontrib><creatorcontrib>Ou, Yi-Ching</creatorcontrib><creatorcontrib>Yang, Chia-Ying</creatorcontrib><creatorcontrib>Chen, June-Rong</creatorcontrib><title>Effect of environmental humidity on rate of thermal outgassing</title><title>Vacuum</title><description>This investigation presents a super-dry venting system that allows the rate of thermal outgassing of an aluminum chamber (length 2
m) to return rapidly to 1
×
10
−13
mbar
L
s
−1
cm
−2 in 4
h without baking. A glove box and an air shower, which provided dehumidified environments with water vapor concentrations of 0.1
ppm and 5
ppm respectively, were utilized to assess the effect of environmental humidity on the rate of thermal outgassing. With super-dry nitrogen venting inside and exposure to the glove box, a thermal outgassing rate of
q
1
∼
1
×
10
−11
mbar
L
s
−1
cm
−2 was achieved.</description><subject>Air showers</subject><subject>Aluminum</subject><subject>Baking</subject><subject>Chambers</subject><subject>Dehumidification</subject><subject>Dry venting</subject><subject>Gloves</subject><subject>Humidity</subject><subject>Outgassing</subject><subject>Thermal outgas</subject><issn>0042-207X</issn><issn>1879-2715</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNp9kEtLAzEUhYMoWKv_wMXsXE3NYzKZbApS6gMKbhTchTRz06bMTGqSKfjvTRnXwoG7uOcc7v0Quid4QTCpHw-Lkzbj2C8oxnKBWVZzgWakEbKkgvBLNMO4oiXF4usa3cR4wBjTGjcztFxbCyYV3hYwnFzwQw9D0l2xH3vXuvRT-KEIOsHZkfYQ-rzzY9rpGN2wu0VXVncR7v7mHH0-rz9Wr-Xm_eVt9bQpDeMslZpxoA1m3IAVVc0NaSsGRNha1BWYLTMCCKdag-QtNXILHGppiMjHW9lSNkcPU-8x-O8RYlK9iwa6Tg_gx6gkFpI1hFbZWU1OE3yMAaw6Btfr8KMIVmda6qAmWupMS2GW1eTYcopB_uLkIKhoHAwGWhcyH9V693_BL0aZdbQ</recordid><startdate>20091210</startdate><enddate>20091210</enddate><creator>Chan, Che-Kai</creator><creator>Cheng, Yu-Tsun</creator><creator>Hsiung, Gao-Yu</creator><creator>Chan, Bei-Jing</creator><creator>Ou, Yi-Ching</creator><creator>Yang, Chia-Ying</creator><creator>Chen, June-Rong</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20091210</creationdate><title>Effect of environmental humidity on rate of thermal outgassing</title><author>Chan, Che-Kai ; Cheng, Yu-Tsun ; Hsiung, Gao-Yu ; Chan, Bei-Jing ; Ou, Yi-Ching ; Yang, Chia-Ying ; Chen, June-Rong</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c353t-a35e28035cef7465c1d43e17f6764ecb3c7e152aae95d2c9be5e69c17715f9d23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Air showers</topic><topic>Aluminum</topic><topic>Baking</topic><topic>Chambers</topic><topic>Dehumidification</topic><topic>Dry venting</topic><topic>Gloves</topic><topic>Humidity</topic><topic>Outgassing</topic><topic>Thermal outgas</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chan, Che-Kai</creatorcontrib><creatorcontrib>Cheng, Yu-Tsun</creatorcontrib><creatorcontrib>Hsiung, Gao-Yu</creatorcontrib><creatorcontrib>Chan, Bei-Jing</creatorcontrib><creatorcontrib>Ou, Yi-Ching</creatorcontrib><creatorcontrib>Yang, Chia-Ying</creatorcontrib><creatorcontrib>Chen, June-Rong</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Vacuum</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Chan, Che-Kai</au><au>Cheng, Yu-Tsun</au><au>Hsiung, Gao-Yu</au><au>Chan, Bei-Jing</au><au>Ou, Yi-Ching</au><au>Yang, Chia-Ying</au><au>Chen, June-Rong</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of environmental humidity on rate of thermal outgassing</atitle><jtitle>Vacuum</jtitle><date>2009-12-10</date><risdate>2009</risdate><volume>84</volume><issue>5</issue><spage>747</spage><epage>750</epage><pages>747-750</pages><issn>0042-207X</issn><eissn>1879-2715</eissn><abstract>This investigation presents a super-dry venting system that allows the rate of thermal outgassing of an aluminum chamber (length 2
m) to return rapidly to 1
×
10
−13
mbar
L
s
−1
cm
−2 in 4
h without baking. A glove box and an air shower, which provided dehumidified environments with water vapor concentrations of 0.1
ppm and 5
ppm respectively, were utilized to assess the effect of environmental humidity on the rate of thermal outgassing. With super-dry nitrogen venting inside and exposure to the glove box, a thermal outgassing rate of
q
1
∼
1
×
10
−11
mbar
L
s
−1
cm
−2 was achieved.</abstract><pub>Elsevier Ltd</pub><doi>10.1016/j.vacuum.2009.03.038</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0042-207X |
| ispartof | Vacuum, 2009-12, Vol.84 (5), p.747-750 |
| issn | 0042-207X 1879-2715 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_907938124 |
| source | Access via ScienceDirect (Elsevier) |
| subjects | Air showers Aluminum Baking Chambers Dehumidification Dry venting Gloves Humidity Outgassing Thermal outgas |
| title | Effect of environmental humidity on rate of thermal outgassing |
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