Ultra-sensitive shape sensor test structures based on piezoresistive doped nanocrystalline silicon

This paper describes the manufacture of a thin skin-like piezoresistor strain-sensing membrane and the miniaturization of dense piezoresistive sensor arrays based on n-type hydrogenated nanocrystalline silicon thin-films (nc-Si:H) deposited on flexible polyimide substrates (PI). The nc-Si:H thin-fil...

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Veröffentlicht in:	Vacuum 2009-06, Vol.83 (10), p.1279-1282
Hauptverfasser:	Alpuim, P., Marins, E.S., Rocha, P.F., Trindade, I.G., Carvalho, M.A., Lanceros-Mendez, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electronics Flexible electronics Membranes Miniaturization Nanocrystals Piezoresistance Plastic Polyimide resins Sensor Sensors Silicon Silicon substrates Textiles Thin-film
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