Novel contact probing method using single fiber optical trapping probe

A novel contact probing method for microdevices with high aspect ratio or biological samples is proposed. In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell st...

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Veröffentlicht in:	Precision engineering 2009-07, Vol.33 (3), p.235-242
Hauptverfasser:	Eom, Sang In, Takaya, Yasuhiro, Hayashi, Terutake
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Fiber optical trapping Industrial metrology. Testing Laser trapping Mechanical engineering. Machine design Microelectronic fabrication (materials and surfaces technology) Nano-CMM Precision engineering, watch making Probing technique Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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