Novel contact probing method using single fiber optical trapping probe
A novel contact probing method for microdevices with high aspect ratio or biological samples is proposed. In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell st...
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| Veröffentlicht in: | Precision engineering 2009-07, Vol.33 (3), p.235-242 |
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| creator | Eom, Sang In Takaya, Yasuhiro Hayashi, Terutake |
| description | A novel contact probing method for microdevices with high aspect ratio or biological samples is proposed. In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell stress theory are applied to obtain a suitable shape for the tip of the optical fiber. The results show that it is possible to trap the microsphere by using a single optical fiber. In experiments, single fiber optical trapping is successfully demonstrated by considering the simulation results. In order to use the trapped microsphere in the touch probe, the intensity of the reentered beam that is reflected from the surface of the microsphere is monitored. When the probe is in contact with the surface of the object, the intensity of the beam changes and this change is used as the contact signal. Because the probe is trapped optically and the trapping force is very small, this system can be used in a low invasive method. |
| doi_str_mv | 10.1016/j.precisioneng.2008.07.008 |
| format | Article |
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In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell stress theory are applied to obtain a suitable shape for the tip of the optical fiber. The results show that it is possible to trap the microsphere by using a single optical fiber. In experiments, single fiber optical trapping is successfully demonstrated by considering the simulation results. In order to use the trapped microsphere in the touch probe, the intensity of the reentered beam that is reflected from the surface of the microsphere is monitored. When the probe is in contact with the surface of the object, the intensity of the beam changes and this change is used as the contact signal. 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In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell stress theory are applied to obtain a suitable shape for the tip of the optical fiber. The results show that it is possible to trap the microsphere by using a single optical fiber. In experiments, single fiber optical trapping is successfully demonstrated by considering the simulation results. In order to use the trapped microsphere in the touch probe, the intensity of the reentered beam that is reflected from the surface of the microsphere is monitored. When the probe is in contact with the surface of the object, the intensity of the beam changes and this change is used as the contact signal. Because the probe is trapped optically and the trapping force is very small, this system can be used in a low invasive method.</description><subject>Applied sciences</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fiber optical trapping</subject><subject>Industrial metrology. Testing</subject><subject>Laser trapping</subject><subject>Mechanical engineering. Machine design</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Nano-CMM</subject><subject>Precision engineering, watch making</subject><subject>Probing technique</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. 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Testing</topic><topic>Laser trapping</topic><topic>Mechanical engineering. Machine design</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Nano-CMM</topic><topic>Precision engineering, watch making</topic><topic>Probing technique</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Eom, Sang In</creatorcontrib><creatorcontrib>Takaya, Yasuhiro</creatorcontrib><creatorcontrib>Hayashi, Terutake</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><jtitle>Precision engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Eom, Sang In</au><au>Takaya, Yasuhiro</au><au>Hayashi, Terutake</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Novel contact probing method using single fiber optical trapping probe</atitle><jtitle>Precision engineering</jtitle><date>2009-07-01</date><risdate>2009</risdate><volume>33</volume><issue>3</issue><spage>235</spage><epage>242</epage><pages>235-242</pages><issn>0141-6359</issn><eissn>1873-2372</eissn><coden>PREGDL</coden><abstract>A novel contact probing method for microdevices with high aspect ratio or biological samples is proposed. In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell stress theory are applied to obtain a suitable shape for the tip of the optical fiber. The results show that it is possible to trap the microsphere by using a single optical fiber. In experiments, single fiber optical trapping is successfully demonstrated by considering the simulation results. In order to use the trapped microsphere in the touch probe, the intensity of the reentered beam that is reflected from the surface of the microsphere is monitored. When the probe is in contact with the surface of the object, the intensity of the beam changes and this change is used as the contact signal. 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| fulltext | fulltext |
| identifier | ISSN: 0141-6359 |
| ispartof | Precision engineering, 2009-07, Vol.33 (3), p.235-242 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Applied sciences Electronics Exact sciences and technology Fiber optical trapping Industrial metrology. Testing Laser trapping Mechanical engineering. Machine design Microelectronic fabrication (materials and surfaces technology) Nano-CMM Precision engineering, watch making Probing technique Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | Novel contact probing method using single fiber optical trapping probe |
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