Light Source Position Measurement Technique Applicable in SOI Technology

Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, additional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration....

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Veröffentlicht in:	IEEE journal of solid-state circuits 2008-07, Vol.43 (7), p.1588-1593
Hauptverfasser:	Koch, C., Oehm, J., Emde, J., Budde, W.
Format:	Artikel
Sprache:	eng
Schlagworte:	CMOS CMOS technology Coordinate measuring machines Costs Devices Diodes Discrete angle detection Goniometers high-sensitivity sensor Isolation technology Leakage current Light Light sources low-cost optical sensor Measurement techniques Optical components Optical devices optical sensor Optical sensors Position measurement Semiconductor device measurement SOI technology
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