Growth, structure and friction behavior of titanium doped tungsten disulphide (Ti-WS 2) nanocomposite thin films

This study describes the synthesis, structure and friction behavior of titanium doped tungsten disulphide (Ti-WS 2) nanocomposite solid lubricant thin films grown by cosputtering at room and 300 °C in situ substrate temperatures. The films were studied by focused ion beam (FIB) prepared cross-sectio...

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Veröffentlicht in:	Thin solid films 2009-08, Vol.517 (19), p.5666-5675
Hauptverfasser:	Scharf, T.W., Rajendran, A., Banerjee, R., Sequeda, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cosputtering Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Nanocomposites Physical properties of thin films, nonelectronic Physical vapor deposition (PVD) Physics Raman scattering Scanning electron microscopy Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Theory and models of film growth Thin film structure and morphology Transmission electron microscopy (TEM) Tribology X-ray diffraction
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