Low-temperature growth of polycrystalline Ge thin film on glass by in situ deposition and ex situ solid-phase crystallization for photovoltaic applications

Poly-crystalline germanium (poly-Ge) thin films have potential for lowering the manufacturing cost of photovoltaic devices especially in tandem solar cells, but high crystalline quality would be required. This work investigates the crystallinity of sputtered Ge thin films on glass prepared by in sit...

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Veröffentlicht in:Applied surface science 2009-05, Vol.255 (15), p.7028-7035
Hauptverfasser: Tsao, Chao-Yang, Weber, Jürgen W., Campbell, Patrick, Widenborg, Per I., Song, Dengyuan, Green, Martin A.
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Sprache:eng
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