Fabrication and properties of B–N codoped p-type ZnO thin films

A p-type B-N codoped ZnO film was grown on quartz by magnetron sputtering and post-annealing techniques. It has room-temperature resistivity of 2.3 W cm, Hall mobility of 11 cm@u2 V@@u-1@ s@@u-1@ and carrier concentration of 1.2 x 10@@u17@ cm@@u-3@, better than the electrical properties of the N-dop...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2009-03, Vol.42 (6), p.065101-065101 (5)
Hauptverfasser: Sui, Y R, Yao, B, Hua, Z, Xing, G Z, Huang, X M, Yang, T, Gao, L L, Zhao, T T, Pan, H L, Zhu, H, Liu, W W, Wu, T
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container_end_page 065101 (5)
container_issue 6
container_start_page 065101
container_title Journal of physics. D, Applied physics
container_volume 42
creator Sui, Y R
Yao, B
Hua, Z
Xing, G Z
Huang, X M
Yang, T
Gao, L L
Zhao, T T
Pan, H L
Zhu, H
Liu, W W
Wu, T
description A p-type B-N codoped ZnO film was grown on quartz by magnetron sputtering and post-annealing techniques. It has room-temperature resistivity of 2.3 W cm, Hall mobility of 11 cm@u2 V@@u-1@ s@@u-1@ and carrier concentration of 1.2 x 10@@u17@ cm@@u-3@, better than the electrical properties of the N-doped p-type ZnO. The ZnO homojunction fabricated by deposition of an undoped n-type ZnO layer on the B-N codoped p-type ZnO layer showed clear p-n diode characteristics. Differing from the N-doped ZnO, the low-temperature photoluminescence spectrum of the codoped ZnO film consists of two dominant peaks located at 3.096 eV and 3.251 eV, respectively. The former is due to radiative electron transition from the conduction band to the Zn vacancy acceptor level, and the latter due to recombination of the donor-acceptor pair. The mechanism of p-type conductivity was discussed in this work.
doi_str_mv 10.1088/0022-3727/42/6/065101
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electrical properties of specific thin films
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Ii-vi semiconductors
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
title Fabrication and properties of B–N codoped p-type ZnO thin films
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