Effect of crystallographic orientation of nanocrystalline TiN on structural, electrical and mechanical properties of TiN/NiTi thin films

Nanocrystalline TiN/NiTi thin films have been grown on silicon substrate by dc magnetron sputtering to improve the surface and mechanical properties of NiTi based shape memory alloys without sacrificing the phase transformation effect. Interestingly, the preferential orientation of the TiN films was...

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Veröffentlicht in:Journal of alloys and compounds 2009-06, Vol.479 (1), p.166-172
Hauptverfasser: Kumar, Ashvani, Singh, Devendra, Kumar, Ravi, Kaur, Davinder
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container_title Journal of alloys and compounds
container_volume 479
creator Kumar, Ashvani
Singh, Devendra
Kumar, Ravi
Kaur, Davinder
description Nanocrystalline TiN/NiTi thin films have been grown on silicon substrate by dc magnetron sputtering to improve the surface and mechanical properties of NiTi based shape memory alloys without sacrificing the phase transformation effect. Interestingly, the preferential orientation of the TiN films was observed to change from (1 1 1) to (2 0 0) with change in nature of sputtering gas from 70% Ar + 30% N 2 to 100% N 2. In present study the influence of crystallographic orientation of TiN on structural, electrical and mechanical properties of TiN/NiTi thin films was investigated systematically. A series of nanoindentations was made on NiTi and TiN/NiTi thin films at millinewton loads with a Berkovich indenter at different temperatures. TiN(2 0 0)/NiTi films were found to exhibit high hardness, high elastic modulus, and thereby better wear resistance as compared to pure NiTi and TiN(1 1 1)/NiTi films. In addition the presence of TiN(2 0 0) improves the top surface quality of NiTi films while retaining the phase transformation effect.
doi_str_mv 10.1016/j.jallcom.2008.12.116
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport in multilayers, nanoscale materials and structures
Exact sciences and technology
Materials science
Mechanical and acoustical properties of condensed matter
Mechanical properties of nanoscale materials
Nanocrystalline
Nanocrystalline materials
Nanoindentation
Nanoscale materials and structures: fabrication and characterization
Physics
TiN/NiTi thin films
title Effect of crystallographic orientation of nanocrystalline TiN on structural, electrical and mechanical properties of TiN/NiTi thin films
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