Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Diamond-like carbon (DLC) films form a critical protective layer on magnetic hard disks and their reading heads. Now tetrahedral amorphous carbon films (ta–C) thickness of 2 nm are becoming the preferred means due to the highly sp 3 content. In this paper, Raman spectra at visible and ultraviolet ex...

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Veröffentlicht in:	Diamond and related materials 2007-09, Vol.16 (9), p.1746-1751
Hauptverfasser:	Liu, Fan-Xin, Yao, Kai-Lun, Liu, Zu-Li
Format:	Artikel
Sprache:	eng
Schlagworte:	Bias Carbon Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Diamond-like carbon films Electric potential Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Fullerenes and related materials diamonds, graphite Materials science Mechanical and acoustical properties Mixing bonds Physical properties of thin films, nonelectronic Physics Raman spectroscopy Silicon substrates sp 3 content Specific materials Substrate bias Surface and interface electron states Surface states, band structure, electron density of states Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Tantalum ta–C films Thick films Ultraviolet
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